8/15/2012	7:32:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	7:32:18 AM	Recipe started at 7:32 AM
8/15/2012	7:32:18 AM	Helium valve closed
8/15/2012	7:32:18 AM	H2 valve closed
8/15/2012	7:32:18 AM	BCl3 valve closed
8/15/2012	7:32:18 AM	PH3 valve closed
8/15/2012	7:32:18 AM	SiCl4 pre valve closed
8/15/2012	7:32:18 AM	SiCl4 post valve closed
8/15/2012	7:32:18 AM	Main Vac valve closed
8/15/2012	7:32:18 AM	Bypass valve closed
8/15/2012	7:32:18 AM	Bubbler valve closed
8/15/2012	7:32:18 AM	Helium MFC set to  0.000000
8/15/2012	7:32:18 AM	H2 MFC set to  0.000000
8/15/2012	7:32:18 AM	BCl3 MFC set to  0.000000
8/15/2012	7:32:18 AM	PH3 MFC set to  0.000000
8/15/2012	7:32:18 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:32:18 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:32:19 AM	Tube furnace set to 0
8/15/2012	7:32:22 AM	H2 valve closed
8/15/2012	7:32:22 AM	BCl3 valve closed
8/15/2012	7:32:22 AM	PH3 valve closed
8/15/2012	7:32:22 AM	SiCl4 pre valve closed
8/15/2012	7:32:22 AM	SiCl4 post valve closed
8/15/2012	7:32:22 AM	Main Vac valve closed
8/15/2012	7:32:22 AM	Bypass valve closed
8/15/2012	7:32:22 AM	Bubbler valve closed
8/15/2012	7:32:22 AM	Helium valve opened
8/15/2012	7:32:22 AM	Helium MFC set to  500.000000
8/15/2012	7:32:22 AM	H2 MFC set to  0.000000
8/15/2012	7:32:22 AM	BCl3 MFC set to  0.000000
8/15/2012	7:32:22 AM	PH3 MFC set to  0.000000
8/15/2012	7:32:22 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:32:22 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:32:22 AM	Tube furnace set to 0
8/15/2012	7:33:34 AM	Helium valve closed
8/15/2012	7:33:34 AM	H2 valve closed
8/15/2012	7:33:34 AM	BCl3 valve closed
8/15/2012	7:33:34 AM	PH3 valve closed
8/15/2012	7:33:34 AM	SiCl4 pre valve closed
8/15/2012	7:33:34 AM	SiCl4 post valve closed
8/15/2012	7:33:34 AM	Main Vac valve closed
8/15/2012	7:33:34 AM	Bypass valve closed
8/15/2012	7:33:34 AM	Bubbler valve closed
8/15/2012	7:33:34 AM	Helium MFC set to  0.000000
8/15/2012	7:33:34 AM	H2 MFC set to  0.000000
8/15/2012	7:33:34 AM	BCl3 MFC set to  0.000000
8/15/2012	7:33:34 AM	PH3 MFC set to  0.000000
8/15/2012	7:33:34 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:33:34 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:33:35 AM	Tube furnace set to 0
8/15/2012	7:33:36 AM	Run finished at 7:33 AM
8/15/2012	7:33:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	7:38:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	7:38:53 AM	Recipe started at 7:38 AM
8/15/2012	7:38:53 AM	Helium valve closed
8/15/2012	7:38:53 AM	H2 valve closed
8/15/2012	7:38:53 AM	BCl3 valve closed
8/15/2012	7:38:53 AM	PH3 valve closed
8/15/2012	7:38:53 AM	SiCl4 pre valve closed
8/15/2012	7:38:53 AM	SiCl4 post valve closed
8/15/2012	7:38:53 AM	Main Vac valve closed
8/15/2012	7:38:53 AM	Bubbler valve closed
8/15/2012	7:38:53 AM	Bypass valve opened
8/15/2012	7:38:53 AM	Helium MFC set to  0.000000
8/15/2012	7:38:53 AM	H2 MFC set to  0.000000
8/15/2012	7:38:53 AM	BCl3 MFC set to  0.000000
8/15/2012	7:38:53 AM	PH3 MFC set to  0.000000
8/15/2012	7:38:53 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:38:53 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:38:53 AM	Tube furnace set to 0
8/15/2012	7:40:19 AM	Helium valve closed
8/15/2012	7:40:19 AM	H2 valve closed
8/15/2012	7:40:19 AM	BCl3 valve closed
8/15/2012	7:40:19 AM	PH3 valve closed
8/15/2012	7:40:19 AM	SiCl4 pre valve closed
8/15/2012	7:40:19 AM	SiCl4 post valve closed
8/15/2012	7:40:19 AM	Main Vac valve closed
8/15/2012	7:40:19 AM	Bubbler valve closed
8/15/2012	7:40:19 AM	Bypass valve opened
8/15/2012	7:40:19 AM	Helium MFC set to  0.000000
8/15/2012	7:40:19 AM	H2 MFC set to  0.000000
8/15/2012	7:40:19 AM	BCl3 MFC set to  0.000000
8/15/2012	7:40:19 AM	PH3 MFC set to  0.000000
8/15/2012	7:40:19 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:40:19 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:40:19 AM	Tube furnace set to 0
8/15/2012	7:41:19 AM	Helium valve closed
8/15/2012	7:41:19 AM	H2 valve closed
8/15/2012	7:41:19 AM	BCl3 valve closed
8/15/2012	7:41:19 AM	PH3 valve closed
8/15/2012	7:41:19 AM	SiCl4 pre valve closed
8/15/2012	7:41:19 AM	SiCl4 post valve closed
8/15/2012	7:41:19 AM	Bypass valve closed
8/15/2012	7:41:19 AM	Bubbler valve closed
8/15/2012	7:41:19 AM	Main Vac valve opened
8/15/2012	7:41:19 AM	Helium MFC set to  0.000000
8/15/2012	7:41:19 AM	H2 MFC set to  0.000000
8/15/2012	7:41:19 AM	BCl3 MFC set to  0.000000
8/15/2012	7:41:19 AM	PH3 MFC set to  0.000000
8/15/2012	7:41:19 AM	SiCl4 MFC set to  0.000000
8/15/2012	7:41:19 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:41:19 AM	Tube furnace set to 0
8/15/2012	7:41:20 AM	Run finished at 7:41 AM
8/15/2012	7:41:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	9:03:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	9:03:34 AM	Recipe started at 9:03 AM
8/15/2012	9:03:34 AM	Helium valve closed
8/15/2012	9:03:34 AM	H2 valve closed
8/15/2012	9:03:34 AM	BCl3 valve closed
8/15/2012	9:03:34 AM	PH3 valve closed
8/15/2012	9:03:34 AM	SiCl4 pre valve closed
8/15/2012	9:03:34 AM	SiCl4 post valve closed
8/15/2012	9:03:34 AM	Main Vac valve closed
8/15/2012	9:03:34 AM	Bypass valve closed
8/15/2012	9:03:34 AM	Bubbler valve closed
8/15/2012	9:03:34 AM	Helium MFC set to  0.000000
8/15/2012	9:03:34 AM	H2 MFC set to  0.000000
8/15/2012	9:03:34 AM	BCl3 MFC set to  0.000000
8/15/2012	9:03:34 AM	PH3 MFC set to  0.000000
8/15/2012	9:03:34 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:03:34 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:03:34 AM	Tube furnace set to 0
8/15/2012	9:03:35 AM	Run finished at 9:03 AM
8/15/2012	9:03:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	9:03:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	9:03:46 AM	Recipe started at 9:03 AM
8/15/2012	9:03:47 AM	Helium valve closed
8/15/2012	9:03:47 AM	H2 valve closed
8/15/2012	9:03:47 AM	BCl3 valve closed
8/15/2012	9:03:47 AM	PH3 valve closed
8/15/2012	9:03:47 AM	SiCl4 pre valve closed
8/15/2012	9:03:47 AM	SiCl4 post valve closed
8/15/2012	9:03:47 AM	Main Vac valve closed
8/15/2012	9:03:47 AM	Bubbler valve closed
8/15/2012	9:03:47 AM	Bypass valve opened
8/15/2012	9:03:47 AM	Helium MFC set to  0.000000
8/15/2012	9:03:47 AM	H2 MFC set to  0.000000
8/15/2012	9:03:47 AM	BCl3 MFC set to  0.000000
8/15/2012	9:03:47 AM	PH3 MFC set to  0.000000
8/15/2012	9:03:47 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:03:47 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:03:47 AM	Tube furnace set to 0
8/15/2012	9:03:47 AM	Helium valve closed
8/15/2012	9:03:47 AM	H2 valve closed
8/15/2012	9:03:47 AM	BCl3 valve closed
8/15/2012	9:03:47 AM	PH3 valve closed
8/15/2012	9:03:47 AM	SiCl4 pre valve closed
8/15/2012	9:03:47 AM	SiCl4 post valve closed
8/15/2012	9:03:47 AM	Main Vac valve closed
8/15/2012	9:03:47 AM	Bubbler valve closed
8/15/2012	9:03:47 AM	Bypass valve opened
8/15/2012	9:03:47 AM	Helium MFC set to  0.000000
8/15/2012	9:03:47 AM	H2 MFC set to  0.000000
8/15/2012	9:03:47 AM	BCl3 MFC set to  0.000000
8/15/2012	9:03:47 AM	PH3 MFC set to  0.000000
8/15/2012	9:03:47 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:03:47 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:03:47 AM	Tube furnace set to 0
8/15/2012	9:04:01 AM	Helium valve closed
8/15/2012	9:04:01 AM	H2 valve closed
8/15/2012	9:04:01 AM	BCl3 valve closed
8/15/2012	9:04:01 AM	PH3 valve closed
8/15/2012	9:04:01 AM	SiCl4 pre valve closed
8/15/2012	9:04:01 AM	SiCl4 post valve closed
8/15/2012	9:04:01 AM	Bypass valve closed
8/15/2012	9:04:01 AM	Bubbler valve closed
8/15/2012	9:04:01 AM	Main Vac valve opened
8/15/2012	9:04:01 AM	Helium MFC set to  0.000000
8/15/2012	9:04:01 AM	H2 MFC set to  0.000000
8/15/2012	9:04:01 AM	BCl3 MFC set to  0.000000
8/15/2012	9:04:01 AM	PH3 MFC set to  0.000000
8/15/2012	9:04:01 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:04:01 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:04:01 AM	Tube furnace set to 0
8/15/2012	9:04:02 AM	Run finished at 9:04 AM
8/15/2012	9:04:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	9:04:20 AM	Recipe started at 9:04 AM
8/15/2012	9:04:20 AM	Helium valve closed
8/15/2012	9:04:20 AM	H2 valve closed
8/15/2012	9:04:20 AM	BCl3 valve closed
8/15/2012	9:04:20 AM	PH3 valve closed
8/15/2012	9:04:20 AM	SiCl4 pre valve closed
8/15/2012	9:04:20 AM	SiCl4 post valve closed
8/15/2012	9:04:20 AM	Main Vac valve closed
8/15/2012	9:04:20 AM	Bypass valve closed
8/15/2012	9:04:20 AM	Bubbler valve closed
8/15/2012	9:04:20 AM	Helium MFC set to  0.000000
8/15/2012	9:04:20 AM	H2 MFC set to  0.000000
8/15/2012	9:04:20 AM	BCl3 MFC set to  0.000000
8/15/2012	9:04:20 AM	PH3 MFC set to  0.000000
8/15/2012	9:04:20 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:04:20 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:04:20 AM	Tube furnace set to 0
8/15/2012	9:04:23 AM	Helium valve closed
8/15/2012	9:04:23 AM	BCl3 valve closed
8/15/2012	9:04:23 AM	PH3 valve closed
8/15/2012	9:04:23 AM	SiCl4 pre valve closed
8/15/2012	9:04:23 AM	SiCl4 post valve closed
8/15/2012	9:04:23 AM	Main Vac valve closed
8/15/2012	9:04:23 AM	Bypass valve closed
8/15/2012	9:04:23 AM	Bubbler valve closed
8/15/2012	9:04:23 AM	H2 valve opened
8/15/2012	9:04:23 AM	Helium MFC set to  0.000000
8/15/2012	9:04:23 AM	H2 MFC set to  450.000000
8/15/2012	9:04:23 AM	BCl3 MFC set to  0.000000
8/15/2012	9:04:24 AM	PH3 MFC set to  0.000000
8/15/2012	9:04:24 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:04:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:04:24 AM	Tube furnace set to 50
8/15/2012	9:05:47 AM	Helium valve closed
8/15/2012	9:05:47 AM	BCl3 valve closed
8/15/2012	9:05:47 AM	PH3 valve closed
8/15/2012	9:05:47 AM	SiCl4 pre valve closed
8/15/2012	9:05:47 AM	SiCl4 post valve closed
8/15/2012	9:05:47 AM	Main Vac valve closed
8/15/2012	9:05:47 AM	Bypass valve closed
8/15/2012	9:05:47 AM	H2 valve opened
8/15/2012	9:05:47 AM	Bubbler valve opened
8/15/2012	9:05:47 AM	Helium MFC set to  0.000000
8/15/2012	9:05:47 AM	H2 MFC set to  450.000000
8/15/2012	9:05:47 AM	BCl3 MFC set to  0.000000
8/15/2012	9:05:47 AM	PH3 MFC set to  0.000000
8/15/2012	9:05:47 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:05:47 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:05:48 AM	Tube furnace set to 50
8/15/2012	9:05:49 AM	Helium valve closed
8/15/2012	9:05:49 AM	BCl3 valve closed
8/15/2012	9:05:49 AM	PH3 valve closed
8/15/2012	9:05:49 AM	SiCl4 pre valve closed
8/15/2012	9:05:49 AM	SiCl4 post valve closed
8/15/2012	9:05:49 AM	Main Vac valve closed
8/15/2012	9:05:49 AM	Bypass valve closed
8/15/2012	9:05:49 AM	H2 valve opened
8/15/2012	9:05:49 AM	Bubbler valve opened
8/15/2012	9:05:49 AM	Helium MFC set to  0.000000
8/15/2012	9:05:49 AM	H2 MFC set to  450.000000
8/15/2012	9:05:49 AM	BCl3 MFC set to  0.000000
8/15/2012	9:05:49 AM	PH3 MFC set to  0.000000
8/15/2012	9:05:49 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:05:49 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:05:49 AM	Tube furnace set to 1000
8/15/2012	9:25:49 AM	Helium valve closed
8/15/2012	9:25:49 AM	PH3 valve closed
8/15/2012	9:25:49 AM	Main Vac valve closed
8/15/2012	9:25:49 AM	Bypass valve closed
8/15/2012	9:25:49 AM	H2 valve opened
8/15/2012	9:25:49 AM	BCl3 valve opened
8/15/2012	9:25:49 AM	SiCl4 pre valve opened
8/15/2012	9:25:49 AM	SiCl4 post valve opened
8/15/2012	9:25:49 AM	Bubbler valve opened
8/15/2012	9:25:49 AM	Helium MFC set to  0.000000
8/15/2012	9:25:49 AM	H2 MFC set to  450.000000
8/15/2012	9:25:49 AM	BCl3 MFC set to  1.000000
8/15/2012	9:25:49 AM	PH3 MFC set to  0.000000
8/15/2012	9:25:49 AM	SiCl4 MFC set to  50.000000
8/15/2012	9:25:49 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:25:49 AM	Tube furnace set to 1000
8/15/2012	9:45:49 AM	Helium valve closed
8/15/2012	9:45:49 AM	BCl3 valve closed
8/15/2012	9:45:49 AM	PH3 valve closed
8/15/2012	9:45:49 AM	SiCl4 pre valve closed
8/15/2012	9:45:49 AM	SiCl4 post valve closed
8/15/2012	9:45:49 AM	Main Vac valve closed
8/15/2012	9:45:49 AM	Bypass valve closed
8/15/2012	9:45:49 AM	H2 valve opened
8/15/2012	9:45:49 AM	Bubbler valve opened
8/15/2012	9:45:49 AM	Helium MFC set to  0.000000
8/15/2012	9:45:49 AM	H2 MFC set to  450.000000
8/15/2012	9:45:49 AM	BCl3 MFC set to  0.000000
8/15/2012	9:45:49 AM	PH3 MFC set to  0.000000
8/15/2012	9:45:49 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:45:49 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:45:49 AM	Tube furnace set to 950
8/15/2012	9:48:49 AM	Helium valve closed
8/15/2012	9:48:49 AM	BCl3 valve closed
8/15/2012	9:48:49 AM	PH3 valve closed
8/15/2012	9:48:49 AM	SiCl4 pre valve closed
8/15/2012	9:48:49 AM	SiCl4 post valve closed
8/15/2012	9:48:49 AM	Main Vac valve closed
8/15/2012	9:48:49 AM	Bypass valve closed
8/15/2012	9:48:49 AM	H2 valve opened
8/15/2012	9:48:49 AM	Bubbler valve opened
8/15/2012	9:48:49 AM	Helium MFC set to  0.000000
8/15/2012	9:48:49 AM	H2 MFC set to  450.000000
8/15/2012	9:48:49 AM	BCl3 MFC set to  0.000000
8/15/2012	9:48:49 AM	PH3 MFC set to  0.000000
8/15/2012	9:48:49 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:48:49 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:48:50 AM	Tube furnace set to 900
8/15/2012	9:51:50 AM	Helium valve closed
8/15/2012	9:51:50 AM	BCl3 valve closed
8/15/2012	9:51:50 AM	PH3 valve closed
8/15/2012	9:51:50 AM	SiCl4 pre valve closed
8/15/2012	9:51:50 AM	SiCl4 post valve closed
8/15/2012	9:51:50 AM	Main Vac valve closed
8/15/2012	9:51:50 AM	Bypass valve closed
8/15/2012	9:51:50 AM	H2 valve opened
8/15/2012	9:51:50 AM	Bubbler valve opened
8/15/2012	9:51:50 AM	Helium MFC set to  0.000000
8/15/2012	9:51:50 AM	H2 MFC set to  450.000000
8/15/2012	9:51:50 AM	BCl3 MFC set to  0.000000
8/15/2012	9:51:50 AM	PH3 MFC set to  0.000000
8/15/2012	9:51:50 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:51:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:51:50 AM	Tube furnace set to 850
8/15/2012	9:54:50 AM	Helium valve closed
8/15/2012	9:54:50 AM	BCl3 valve closed
8/15/2012	9:54:50 AM	PH3 valve closed
8/15/2012	9:54:50 AM	SiCl4 pre valve closed
8/15/2012	9:54:50 AM	SiCl4 post valve closed
8/15/2012	9:54:50 AM	Main Vac valve closed
8/15/2012	9:54:50 AM	Bypass valve closed
8/15/2012	9:54:50 AM	H2 valve opened
8/15/2012	9:54:50 AM	Bubbler valve opened
8/15/2012	9:54:50 AM	Helium MFC set to  0.000000
8/15/2012	9:54:50 AM	H2 MFC set to  450.000000
8/15/2012	9:54:50 AM	BCl3 MFC set to  0.000000
8/15/2012	9:54:50 AM	PH3 MFC set to  0.000000
8/15/2012	9:54:50 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:54:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:54:50 AM	Tube furnace set to 800
8/15/2012	9:57:50 AM	Helium valve closed
8/15/2012	9:57:50 AM	BCl3 valve closed
8/15/2012	9:57:50 AM	PH3 valve closed
8/15/2012	9:57:50 AM	SiCl4 pre valve closed
8/15/2012	9:57:50 AM	SiCl4 post valve closed
8/15/2012	9:57:50 AM	Main Vac valve closed
8/15/2012	9:57:50 AM	Bypass valve closed
8/15/2012	9:57:50 AM	H2 valve opened
8/15/2012	9:57:50 AM	Bubbler valve opened
8/15/2012	9:57:50 AM	Helium MFC set to  0.000000
8/15/2012	9:57:50 AM	H2 MFC set to  450.000000
8/15/2012	9:57:50 AM	BCl3 MFC set to  0.000000
8/15/2012	9:57:50 AM	PH3 MFC set to  0.000000
8/15/2012	9:57:50 AM	SiCl4 MFC set to  0.000000
8/15/2012	9:57:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	9:57:50 AM	Tube furnace set to 750
8/15/2012	10:00:50 AM	H2 valve closed
8/15/2012	10:00:50 AM	BCl3 valve closed
8/15/2012	10:00:50 AM	PH3 valve closed
8/15/2012	10:00:50 AM	SiCl4 pre valve closed
8/15/2012	10:00:50 AM	SiCl4 post valve closed
8/15/2012	10:00:50 AM	Main Vac valve closed
8/15/2012	10:00:50 AM	Bypass valve closed
8/15/2012	10:00:50 AM	Helium valve opened
8/15/2012	10:00:50 AM	Bubbler valve opened
8/15/2012	10:00:50 AM	Helium MFC set to  400.000000
8/15/2012	10:00:50 AM	H2 MFC set to  0.000000
8/15/2012	10:00:50 AM	BCl3 MFC set to  0.000000
8/15/2012	10:00:50 AM	PH3 MFC set to  0.000000
8/15/2012	10:00:50 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:00:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:00:50 AM	Tube furnace set to 0
8/15/2012	10:25:51 AM	Helium valve closed
8/15/2012	10:25:51 AM	H2 valve closed
8/15/2012	10:25:51 AM	BCl3 valve closed
8/15/2012	10:25:51 AM	PH3 valve closed
8/15/2012	10:25:51 AM	SiCl4 pre valve closed
8/15/2012	10:25:51 AM	SiCl4 post valve closed
8/15/2012	10:25:51 AM	Main Vac valve closed
8/15/2012	10:25:51 AM	Bypass valve closed
8/15/2012	10:25:51 AM	Bubbler valve closed
8/15/2012	10:25:51 AM	Helium MFC set to  0.000000
8/15/2012	10:25:51 AM	H2 MFC set to  0.000000
8/15/2012	10:25:51 AM	BCl3 MFC set to  0.000000
8/15/2012	10:25:51 AM	PH3 MFC set to  0.000000
8/15/2012	10:25:51 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:25:51 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:25:51 AM	Tube furnace set to 50
8/15/2012	10:30:51 AM	Helium valve closed
8/15/2012	10:30:51 AM	H2 valve closed
8/15/2012	10:30:51 AM	BCl3 valve closed
8/15/2012	10:30:51 AM	PH3 valve closed
8/15/2012	10:30:51 AM	SiCl4 pre valve closed
8/15/2012	10:30:51 AM	SiCl4 post valve closed
8/15/2012	10:30:51 AM	Main Vac valve closed
8/15/2012	10:30:51 AM	Bubbler valve closed
8/15/2012	10:30:51 AM	Bypass valve opened
8/15/2012	10:30:51 AM	Helium MFC set to  0.000000
8/15/2012	10:30:51 AM	H2 MFC set to  0.000000
8/15/2012	10:30:51 AM	BCl3 MFC set to  0.000000
8/15/2012	10:30:51 AM	PH3 MFC set to  0.000000
8/15/2012	10:30:51 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:30:51 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:30:51 AM	Tube furnace set to 0
8/15/2012	10:31:55 AM	Helium valve closed
8/15/2012	10:31:55 AM	H2 valve closed
8/15/2012	10:31:55 AM	BCl3 valve closed
8/15/2012	10:31:55 AM	PH3 valve closed
8/15/2012	10:31:55 AM	SiCl4 pre valve closed
8/15/2012	10:31:55 AM	SiCl4 post valve closed
8/15/2012	10:31:55 AM	Bypass valve closed
8/15/2012	10:31:55 AM	Bubbler valve closed
8/15/2012	10:31:55 AM	Main Vac valve opened
8/15/2012	10:31:55 AM	Helium MFC set to  0.000000
8/15/2012	10:31:55 AM	H2 MFC set to  0.000000
8/15/2012	10:31:55 AM	BCl3 MFC set to  0.000000
8/15/2012	10:31:55 AM	PH3 MFC set to  0.000000
8/15/2012	10:31:55 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:31:55 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:31:55 AM	Tube furnace set to 0
8/15/2012	10:31:56 AM	Run finished at 10:31 AM
8/15/2012	10:33:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	10:33:53 AM	Recipe started at 10:33 AM
8/15/2012	10:33:53 AM	Helium valve closed
8/15/2012	10:33:53 AM	H2 valve closed
8/15/2012	10:33:53 AM	BCl3 valve closed
8/15/2012	10:33:53 AM	PH3 valve closed
8/15/2012	10:33:53 AM	SiCl4 pre valve closed
8/15/2012	10:33:53 AM	SiCl4 post valve closed
8/15/2012	10:33:53 AM	Main Vac valve closed
8/15/2012	10:33:53 AM	Bypass valve closed
8/15/2012	10:33:53 AM	Bubbler valve closed
8/15/2012	10:33:53 AM	Helium MFC set to  0.000000
8/15/2012	10:33:53 AM	H2 MFC set to  0.000000
8/15/2012	10:33:53 AM	BCl3 MFC set to  0.000000
8/15/2012	10:33:53 AM	PH3 MFC set to  0.000000
8/15/2012	10:33:53 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:33:53 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:33:54 AM	Tube furnace set to 0
8/15/2012	10:33:57 AM	H2 valve closed
8/15/2012	10:33:57 AM	BCl3 valve closed
8/15/2012	10:33:57 AM	PH3 valve closed
8/15/2012	10:33:57 AM	SiCl4 pre valve closed
8/15/2012	10:33:57 AM	SiCl4 post valve closed
8/15/2012	10:33:57 AM	Main Vac valve closed
8/15/2012	10:33:57 AM	Bypass valve closed
8/15/2012	10:33:57 AM	Bubbler valve closed
8/15/2012	10:33:57 AM	Helium valve opened
8/15/2012	10:33:57 AM	Helium MFC set to  500.000000
8/15/2012	10:33:57 AM	H2 MFC set to  0.000000
8/15/2012	10:33:57 AM	BCl3 MFC set to  0.000000
8/15/2012	10:33:57 AM	PH3 MFC set to  0.000000
8/15/2012	10:33:57 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:33:57 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:33:57 AM	Tube furnace set to 0
8/15/2012	10:35:07 AM	Helium valve closed
8/15/2012	10:35:07 AM	H2 valve closed
8/15/2012	10:35:07 AM	BCl3 valve closed
8/15/2012	10:35:07 AM	PH3 valve closed
8/15/2012	10:35:07 AM	SiCl4 pre valve closed
8/15/2012	10:35:07 AM	SiCl4 post valve closed
8/15/2012	10:35:07 AM	Main Vac valve closed
8/15/2012	10:35:07 AM	Bypass valve closed
8/15/2012	10:35:07 AM	Bubbler valve closed
8/15/2012	10:35:07 AM	Helium MFC set to  0.000000
8/15/2012	10:35:07 AM	H2 MFC set to  0.000000
8/15/2012	10:35:07 AM	BCl3 MFC set to  0.000000
8/15/2012	10:35:07 AM	PH3 MFC set to  0.000000
8/15/2012	10:35:07 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:35:07 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:35:08 AM	Tube furnace set to 0
8/15/2012	10:35:09 AM	Run finished at 10:35 AM
8/15/2012	10:35:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	10:41:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	10:41:41 AM	Recipe started at 10:41 AM
8/15/2012	10:41:41 AM	Helium valve closed
8/15/2012	10:41:41 AM	H2 valve closed
8/15/2012	10:41:41 AM	BCl3 valve closed
8/15/2012	10:41:41 AM	PH3 valve closed
8/15/2012	10:41:41 AM	SiCl4 pre valve closed
8/15/2012	10:41:41 AM	SiCl4 post valve closed
8/15/2012	10:41:41 AM	Main Vac valve closed
8/15/2012	10:41:41 AM	Bubbler valve closed
8/15/2012	10:41:41 AM	Bypass valve opened
8/15/2012	10:41:41 AM	Helium MFC set to  0.000000
8/15/2012	10:41:41 AM	H2 MFC set to  0.000000
8/15/2012	10:41:41 AM	BCl3 MFC set to  0.000000
8/15/2012	10:41:41 AM	PH3 MFC set to  0.000000
8/15/2012	10:41:41 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:41:41 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:41:41 AM	Tube furnace set to 0
8/15/2012	10:43:04 AM	Helium valve closed
8/15/2012	10:43:04 AM	H2 valve closed
8/15/2012	10:43:04 AM	BCl3 valve closed
8/15/2012	10:43:04 AM	PH3 valve closed
8/15/2012	10:43:04 AM	SiCl4 pre valve closed
8/15/2012	10:43:04 AM	SiCl4 post valve closed
8/15/2012	10:43:04 AM	Main Vac valve closed
8/15/2012	10:43:04 AM	Bubbler valve closed
8/15/2012	10:43:04 AM	Bypass valve opened
8/15/2012	10:43:04 AM	Helium MFC set to  0.000000
8/15/2012	10:43:04 AM	H2 MFC set to  0.000000
8/15/2012	10:43:04 AM	BCl3 MFC set to  0.000000
8/15/2012	10:43:04 AM	PH3 MFC set to  0.000000
8/15/2012	10:43:04 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:43:04 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:43:04 AM	Tube furnace set to 0
8/15/2012	10:44:04 AM	Helium valve closed
8/15/2012	10:44:04 AM	H2 valve closed
8/15/2012	10:44:04 AM	BCl3 valve closed
8/15/2012	10:44:04 AM	PH3 valve closed
8/15/2012	10:44:04 AM	SiCl4 pre valve closed
8/15/2012	10:44:04 AM	SiCl4 post valve closed
8/15/2012	10:44:04 AM	Bypass valve closed
8/15/2012	10:44:04 AM	Bubbler valve closed
8/15/2012	10:44:04 AM	Main Vac valve opened
8/15/2012	10:44:04 AM	Helium MFC set to  0.000000
8/15/2012	10:44:04 AM	H2 MFC set to  0.000000
8/15/2012	10:44:04 AM	BCl3 MFC set to  0.000000
8/15/2012	10:44:04 AM	PH3 MFC set to  0.000000
8/15/2012	10:44:04 AM	SiCl4 MFC set to  0.000000
8/15/2012	10:44:04 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	10:44:04 AM	Tube furnace set to 0
8/15/2012	10:44:05 AM	Run finished at 10:44 AM
8/15/2012	10:44:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	11:22:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	11:22:44 AM	Recipe started at 11:22 AM
8/15/2012	11:22:44 AM	Helium valve closed
8/15/2012	11:22:44 AM	H2 valve closed
8/15/2012	11:22:44 AM	BCl3 valve closed
8/15/2012	11:22:44 AM	PH3 valve closed
8/15/2012	11:22:44 AM	SiCl4 pre valve closed
8/15/2012	11:22:44 AM	SiCl4 post valve closed
8/15/2012	11:22:44 AM	Main Vac valve closed
8/15/2012	11:22:44 AM	Bypass valve closed
8/15/2012	11:22:44 AM	Bubbler valve closed
8/15/2012	11:22:44 AM	Helium MFC set to  0.000000
8/15/2012	11:22:44 AM	H2 MFC set to  0.000000
8/15/2012	11:22:44 AM	BCl3 MFC set to  0.000000
8/15/2012	11:22:44 AM	PH3 MFC set to  0.000000
8/15/2012	11:22:44 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:22:44 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:22:44 AM	Tube furnace set to 0
8/15/2012	11:22:44 AM	Run finished at 11:22 AM
8/15/2012	11:22:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	11:22:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	11:22:54 AM	Recipe started at 11:22 AM
8/15/2012	11:22:54 AM	Helium valve closed
8/15/2012	11:22:54 AM	H2 valve closed
8/15/2012	11:22:54 AM	BCl3 valve closed
8/15/2012	11:22:54 AM	PH3 valve closed
8/15/2012	11:22:54 AM	SiCl4 pre valve closed
8/15/2012	11:22:54 AM	SiCl4 post valve closed
8/15/2012	11:22:54 AM	Main Vac valve closed
8/15/2012	11:22:54 AM	Bubbler valve closed
8/15/2012	11:22:54 AM	Bypass valve opened
8/15/2012	11:22:54 AM	Helium MFC set to  0.000000
8/15/2012	11:22:54 AM	H2 MFC set to  0.000000
8/15/2012	11:22:54 AM	BCl3 MFC set to  0.000000
8/15/2012	11:22:54 AM	PH3 MFC set to  0.000000
8/15/2012	11:22:54 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:22:54 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:22:54 AM	Tube furnace set to 0
8/15/2012	11:22:55 AM	Helium valve closed
8/15/2012	11:22:55 AM	H2 valve closed
8/15/2012	11:22:55 AM	BCl3 valve closed
8/15/2012	11:22:55 AM	PH3 valve closed
8/15/2012	11:22:55 AM	SiCl4 pre valve closed
8/15/2012	11:22:55 AM	SiCl4 post valve closed
8/15/2012	11:22:55 AM	Main Vac valve closed
8/15/2012	11:22:55 AM	Bubbler valve closed
8/15/2012	11:22:55 AM	Bypass valve opened
8/15/2012	11:22:55 AM	Helium MFC set to  0.000000
8/15/2012	11:22:55 AM	H2 MFC set to  0.000000
8/15/2012	11:22:55 AM	BCl3 MFC set to  0.000000
8/15/2012	11:22:55 AM	PH3 MFC set to  0.000000
8/15/2012	11:22:55 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:22:55 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:22:55 AM	Tube furnace set to 0
8/15/2012	11:22:59 AM	Helium valve closed
8/15/2012	11:22:59 AM	H2 valve closed
8/15/2012	11:22:59 AM	BCl3 valve closed
8/15/2012	11:23:00 AM	PH3 valve closed
8/15/2012	11:23:00 AM	SiCl4 pre valve closed
8/15/2012	11:23:00 AM	SiCl4 post valve closed
8/15/2012	11:23:00 AM	Bypass valve closed
8/15/2012	11:23:00 AM	Bubbler valve closed
8/15/2012	11:23:00 AM	Main Vac valve opened
8/15/2012	11:23:00 AM	Helium MFC set to  0.000000
8/15/2012	11:23:00 AM	H2 MFC set to  0.000000
8/15/2012	11:23:00 AM	BCl3 MFC set to  0.000000
8/15/2012	11:23:00 AM	PH3 MFC set to  0.000000
8/15/2012	11:23:00 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:23:00 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:23:00 AM	Tube furnace set to 0
8/15/2012	11:23:01 AM	Run finished at 11:23 AM
8/15/2012	11:23:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	11:52:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	11:52:39 AM	Recipe started at 11:52 AM
8/15/2012	11:52:39 AM	Helium valve closed
8/15/2012	11:52:39 AM	H2 valve closed
8/15/2012	11:52:39 AM	BCl3 valve closed
8/15/2012	11:52:39 AM	PH3 valve closed
8/15/2012	11:52:39 AM	SiCl4 pre valve closed
8/15/2012	11:52:39 AM	SiCl4 post valve closed
8/15/2012	11:52:39 AM	Main Vac valve closed
8/15/2012	11:52:39 AM	Bypass valve closed
8/15/2012	11:52:39 AM	Bubbler valve closed
8/15/2012	11:52:39 AM	Helium MFC set to  0.000000
8/15/2012	11:52:39 AM	H2 MFC set to  0.000000
8/15/2012	11:52:39 AM	BCl3 MFC set to  0.000000
8/15/2012	11:52:39 AM	PH3 MFC set to  0.000000
8/15/2012	11:52:39 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:52:39 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:52:39 AM	Tube furnace set to 0
8/15/2012	11:52:39 AM	Run finished at 11:52 AM
8/15/2012	11:52:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	11:52:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	11:52:55 AM	Recipe started at 11:52 AM
8/15/2012	11:52:56 AM	Helium valve closed
8/15/2012	11:52:56 AM	H2 valve closed
8/15/2012	11:52:56 AM	BCl3 valve closed
8/15/2012	11:52:56 AM	PH3 valve closed
8/15/2012	11:52:56 AM	SiCl4 pre valve closed
8/15/2012	11:52:56 AM	SiCl4 post valve closed
8/15/2012	11:52:56 AM	Main Vac valve closed
8/15/2012	11:52:56 AM	Bubbler valve closed
8/15/2012	11:52:56 AM	Bypass valve opened
8/15/2012	11:52:56 AM	Helium MFC set to  0.000000
8/15/2012	11:52:56 AM	H2 MFC set to  0.000000
8/15/2012	11:52:56 AM	BCl3 MFC set to  0.000000
8/15/2012	11:52:56 AM	PH3 MFC set to  0.000000
8/15/2012	11:52:56 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:52:56 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:52:56 AM	Tube furnace set to 0
8/15/2012	11:52:56 AM	Helium valve closed
8/15/2012	11:52:56 AM	H2 valve closed
8/15/2012	11:52:56 AM	BCl3 valve closed
8/15/2012	11:52:56 AM	PH3 valve closed
8/15/2012	11:52:56 AM	SiCl4 pre valve closed
8/15/2012	11:52:56 AM	SiCl4 post valve closed
8/15/2012	11:52:56 AM	Main Vac valve closed
8/15/2012	11:52:56 AM	Bubbler valve closed
8/15/2012	11:52:56 AM	Bypass valve opened
8/15/2012	11:52:56 AM	Helium MFC set to  0.000000
8/15/2012	11:52:56 AM	H2 MFC set to  0.000000
8/15/2012	11:52:56 AM	BCl3 MFC set to  0.000000
8/15/2012	11:52:56 AM	PH3 MFC set to  0.000000
8/15/2012	11:52:56 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:52:56 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:52:56 AM	Tube furnace set to 0
8/15/2012	11:52:56 AM	Helium valve closed
8/15/2012	11:52:56 AM	H2 valve closed
8/15/2012	11:52:56 AM	BCl3 valve closed
8/15/2012	11:52:56 AM	PH3 valve closed
8/15/2012	11:52:56 AM	SiCl4 pre valve closed
8/15/2012	11:52:57 AM	SiCl4 post valve closed
8/15/2012	11:52:57 AM	Bypass valve closed
8/15/2012	11:52:57 AM	Bubbler valve closed
8/15/2012	11:52:57 AM	Main Vac valve opened
8/15/2012	11:52:57 AM	Helium MFC set to  0.000000
8/15/2012	11:52:57 AM	H2 MFC set to  0.000000
8/15/2012	11:52:57 AM	BCl3 MFC set to  0.000000
8/15/2012	11:52:57 AM	PH3 MFC set to  0.000000
8/15/2012	11:52:57 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:52:57 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:52:57 AM	Tube furnace set to 0
8/15/2012	11:52:58 AM	Run finished at 11:52 AM
8/15/2012	11:52:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	11:53:33 AM	Recipe started at 11:53 AM
8/15/2012	11:53:33 AM	Helium valve closed
8/15/2012	11:53:33 AM	H2 valve closed
8/15/2012	11:53:33 AM	BCl3 valve closed
8/15/2012	11:53:33 AM	PH3 valve closed
8/15/2012	11:53:33 AM	SiCl4 pre valve closed
8/15/2012	11:53:33 AM	SiCl4 post valve closed
8/15/2012	11:53:33 AM	Main Vac valve closed
8/15/2012	11:53:33 AM	Bypass valve closed
8/15/2012	11:53:33 AM	Bubbler valve closed
8/15/2012	11:53:33 AM	Helium MFC set to  0.000000
8/15/2012	11:53:33 AM	H2 MFC set to  0.000000
8/15/2012	11:53:33 AM	BCl3 MFC set to  0.000000
8/15/2012	11:53:33 AM	PH3 MFC set to  0.000000
8/15/2012	11:53:33 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:53:33 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:53:34 AM	Tube furnace set to 0
8/15/2012	11:53:37 AM	Helium valve closed
8/15/2012	11:53:37 AM	BCl3 valve closed
8/15/2012	11:53:37 AM	PH3 valve closed
8/15/2012	11:53:37 AM	SiCl4 pre valve closed
8/15/2012	11:53:37 AM	SiCl4 post valve closed
8/15/2012	11:53:37 AM	Main Vac valve closed
8/15/2012	11:53:37 AM	Bypass valve closed
8/15/2012	11:53:37 AM	Bubbler valve closed
8/15/2012	11:53:37 AM	H2 valve opened
8/15/2012	11:53:37 AM	Helium MFC set to  0.000000
8/15/2012	11:53:37 AM	H2 MFC set to  500.000000
8/15/2012	11:53:37 AM	BCl3 MFC set to  0.000000
8/15/2012	11:53:37 AM	PH3 MFC set to  0.000000
8/15/2012	11:53:37 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:53:37 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:53:37 AM	Tube furnace set to 50
8/15/2012	11:54:50 AM	Helium valve closed
8/15/2012	11:54:50 AM	BCl3 valve closed
8/15/2012	11:54:50 AM	PH3 valve closed
8/15/2012	11:54:50 AM	SiCl4 pre valve closed
8/15/2012	11:54:50 AM	SiCl4 post valve closed
8/15/2012	11:54:50 AM	Main Vac valve closed
8/15/2012	11:54:50 AM	Bypass valve closed
8/15/2012	11:54:50 AM	H2 valve opened
8/15/2012	11:54:50 AM	Bubbler valve opened
8/15/2012	11:54:50 AM	Helium MFC set to  0.000000
8/15/2012	11:54:50 AM	H2 MFC set to  500.000000
8/15/2012	11:54:50 AM	BCl3 MFC set to  0.000000
8/15/2012	11:54:50 AM	PH3 MFC set to  0.000000
8/15/2012	11:54:50 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:54:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:54:50 AM	Tube furnace set to 50
8/15/2012	11:54:51 AM	Helium valve closed
8/15/2012	11:54:51 AM	BCl3 valve closed
8/15/2012	11:54:51 AM	PH3 valve closed
8/15/2012	11:54:51 AM	SiCl4 pre valve closed
8/15/2012	11:54:51 AM	SiCl4 post valve closed
8/15/2012	11:54:51 AM	Main Vac valve closed
8/15/2012	11:54:51 AM	Bypass valve closed
8/15/2012	11:54:51 AM	H2 valve opened
8/15/2012	11:54:51 AM	Bubbler valve opened
8/15/2012	11:54:51 AM	Helium MFC set to  0.000000
8/15/2012	11:54:51 AM	H2 MFC set to  500.000000
8/15/2012	11:54:51 AM	BCl3 MFC set to  0.000000
8/15/2012	11:54:51 AM	PH3 MFC set to  0.000000
8/15/2012	11:54:51 AM	SiCl4 MFC set to  0.000000
8/15/2012	11:54:51 AM	Bypass solenoid MFC set to  0.000000
8/15/2012	11:54:51 AM	Tube furnace set to 1000
8/15/2012	12:14:51 PM	Helium valve closed
8/15/2012	12:14:51 PM	PH3 valve closed
8/15/2012	12:14:51 PM	Main Vac valve closed
8/15/2012	12:14:51 PM	Bypass valve closed
8/15/2012	12:14:51 PM	H2 valve opened
8/15/2012	12:14:51 PM	BCl3 valve opened
8/15/2012	12:14:51 PM	SiCl4 pre valve opened
8/15/2012	12:14:51 PM	SiCl4 post valve opened
8/15/2012	12:14:51 PM	Bubbler valve opened
8/15/2012	12:14:51 PM	Helium MFC set to  0.000000
8/15/2012	12:14:51 PM	H2 MFC set to  500.000000
8/15/2012	12:14:51 PM	BCl3 MFC set to  1.000000
8/15/2012	12:14:51 PM	PH3 MFC set to  0.000000
8/15/2012	12:14:51 PM	SiCl4 MFC set to  50.000000
8/15/2012	12:14:51 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:14:51 PM	Tube furnace set to 1000
8/15/2012	12:34:51 PM	Helium valve closed
8/15/2012	12:34:51 PM	BCl3 valve closed
8/15/2012	12:34:51 PM	PH3 valve closed
8/15/2012	12:34:51 PM	SiCl4 pre valve closed
8/15/2012	12:34:51 PM	SiCl4 post valve closed
8/15/2012	12:34:51 PM	Main Vac valve closed
8/15/2012	12:34:51 PM	Bypass valve closed
8/15/2012	12:34:51 PM	H2 valve opened
8/15/2012	12:34:51 PM	Bubbler valve opened
8/15/2012	12:34:51 PM	Helium MFC set to  0.000000
8/15/2012	12:34:51 PM	H2 MFC set to  500.000000
8/15/2012	12:34:51 PM	BCl3 MFC set to  0.000000
8/15/2012	12:34:51 PM	PH3 MFC set to  0.000000
8/15/2012	12:34:51 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:34:51 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:34:51 PM	Tube furnace set to 950
8/15/2012	12:37:51 PM	Helium valve closed
8/15/2012	12:37:51 PM	BCl3 valve closed
8/15/2012	12:37:51 PM	PH3 valve closed
8/15/2012	12:37:51 PM	SiCl4 pre valve closed
8/15/2012	12:37:51 PM	SiCl4 post valve closed
8/15/2012	12:37:51 PM	Main Vac valve closed
8/15/2012	12:37:51 PM	Bypass valve closed
8/15/2012	12:37:51 PM	H2 valve opened
8/15/2012	12:37:51 PM	Bubbler valve opened
8/15/2012	12:37:51 PM	Helium MFC set to  0.000000
8/15/2012	12:37:51 PM	H2 MFC set to  500.000000
8/15/2012	12:37:51 PM	BCl3 MFC set to  0.000000
8/15/2012	12:37:51 PM	PH3 MFC set to  0.000000
8/15/2012	12:37:51 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:37:51 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:37:52 PM	Tube furnace set to 900
8/15/2012	12:40:52 PM	Helium valve closed
8/15/2012	12:40:52 PM	BCl3 valve closed
8/15/2012	12:40:52 PM	PH3 valve closed
8/15/2012	12:40:52 PM	SiCl4 pre valve closed
8/15/2012	12:40:52 PM	SiCl4 post valve closed
8/15/2012	12:40:52 PM	Main Vac valve closed
8/15/2012	12:40:52 PM	Bypass valve closed
8/15/2012	12:40:52 PM	H2 valve opened
8/15/2012	12:40:52 PM	Bubbler valve opened
8/15/2012	12:40:52 PM	Helium MFC set to  0.000000
8/15/2012	12:40:52 PM	H2 MFC set to  500.000000
8/15/2012	12:40:52 PM	BCl3 MFC set to  0.000000
8/15/2012	12:40:52 PM	PH3 MFC set to  0.000000
8/15/2012	12:40:52 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:40:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:40:52 PM	Tube furnace set to 850
8/15/2012	12:43:52 PM	Helium valve closed
8/15/2012	12:43:52 PM	BCl3 valve closed
8/15/2012	12:43:52 PM	PH3 valve closed
8/15/2012	12:43:52 PM	SiCl4 pre valve closed
8/15/2012	12:43:52 PM	SiCl4 post valve closed
8/15/2012	12:43:52 PM	Main Vac valve closed
8/15/2012	12:43:52 PM	Bypass valve closed
8/15/2012	12:43:52 PM	H2 valve opened
8/15/2012	12:43:52 PM	Bubbler valve opened
8/15/2012	12:43:52 PM	Helium MFC set to  0.000000
8/15/2012	12:43:52 PM	H2 MFC set to  500.000000
8/15/2012	12:43:52 PM	BCl3 MFC set to  0.000000
8/15/2012	12:43:52 PM	PH3 MFC set to  0.000000
8/15/2012	12:43:52 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:43:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:43:52 PM	Tube furnace set to 800
8/15/2012	12:46:52 PM	Helium valve closed
8/15/2012	12:46:52 PM	BCl3 valve closed
8/15/2012	12:46:52 PM	PH3 valve closed
8/15/2012	12:46:52 PM	SiCl4 pre valve closed
8/15/2012	12:46:52 PM	SiCl4 post valve closed
8/15/2012	12:46:52 PM	Main Vac valve closed
8/15/2012	12:46:52 PM	Bypass valve closed
8/15/2012	12:46:52 PM	H2 valve opened
8/15/2012	12:46:52 PM	Bubbler valve opened
8/15/2012	12:46:52 PM	Helium MFC set to  0.000000
8/15/2012	12:46:52 PM	H2 MFC set to  500.000000
8/15/2012	12:46:52 PM	BCl3 MFC set to  0.000000
8/15/2012	12:46:52 PM	PH3 MFC set to  0.000000
8/15/2012	12:46:52 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:46:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:46:52 PM	Tube furnace set to 750
8/15/2012	12:49:52 PM	H2 valve closed
8/15/2012	12:49:52 PM	BCl3 valve closed
8/15/2012	12:49:52 PM	PH3 valve closed
8/15/2012	12:49:52 PM	SiCl4 pre valve closed
8/15/2012	12:49:52 PM	SiCl4 post valve closed
8/15/2012	12:49:52 PM	Main Vac valve closed
8/15/2012	12:49:52 PM	Bypass valve closed
8/15/2012	12:49:52 PM	Helium valve opened
8/15/2012	12:49:52 PM	Bubbler valve opened
8/15/2012	12:49:52 PM	Helium MFC set to  400.000000
8/15/2012	12:49:52 PM	H2 MFC set to  0.000000
8/15/2012	12:49:52 PM	BCl3 MFC set to  0.000000
8/15/2012	12:49:52 PM	PH3 MFC set to  0.000000
8/15/2012	12:49:52 PM	SiCl4 MFC set to  0.000000
8/15/2012	12:49:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	12:49:53 PM	Tube furnace set to 0
8/15/2012	1:04:26 PM	Helium valve closed
8/15/2012	1:04:26 PM	H2 valve closed
8/15/2012	1:04:26 PM	BCl3 valve closed
8/15/2012	1:04:26 PM	PH3 valve closed
8/15/2012	1:04:26 PM	SiCl4 pre valve closed
8/15/2012	1:04:26 PM	SiCl4 post valve closed
8/15/2012	1:04:26 PM	Main Vac valve closed
8/15/2012	1:04:26 PM	Bypass valve closed
8/15/2012	1:04:26 PM	Bubbler valve closed
8/15/2012	1:04:26 PM	Helium MFC set to  0.000000
8/15/2012	1:04:26 PM	H2 MFC set to  0.000000
8/15/2012	1:04:26 PM	BCl3 MFC set to  0.000000
8/15/2012	1:04:26 PM	PH3 MFC set to  0.000000
8/15/2012	1:04:26 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:04:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:04:27 PM	Tube furnace set to 50
8/15/2012	1:04:48 PM	Helium valve closed
8/15/2012	1:04:48 PM	H2 valve closed
8/15/2012	1:04:48 PM	BCl3 valve closed
8/15/2012	1:04:48 PM	PH3 valve closed
8/15/2012	1:04:48 PM	SiCl4 pre valve closed
8/15/2012	1:04:48 PM	SiCl4 post valve closed
8/15/2012	1:04:48 PM	Main Vac valve closed
8/15/2012	1:04:48 PM	Bubbler valve closed
8/15/2012	1:04:48 PM	Bypass valve opened
8/15/2012	1:04:48 PM	Helium MFC set to  0.000000
8/15/2012	1:04:48 PM	H2 MFC set to  0.000000
8/15/2012	1:04:48 PM	BCl3 MFC set to  0.000000
8/15/2012	1:04:48 PM	PH3 MFC set to  0.000000
8/15/2012	1:04:48 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:04:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:04:48 PM	Tube furnace set to 0
8/15/2012	1:05:48 PM	Helium valve closed
8/15/2012	1:05:48 PM	H2 valve closed
8/15/2012	1:05:48 PM	BCl3 valve closed
8/15/2012	1:05:48 PM	PH3 valve closed
8/15/2012	1:05:48 PM	SiCl4 pre valve closed
8/15/2012	1:05:48 PM	SiCl4 post valve closed
8/15/2012	1:05:48 PM	Bypass valve closed
8/15/2012	1:05:48 PM	Bubbler valve closed
8/15/2012	1:05:48 PM	Main Vac valve opened
8/15/2012	1:05:48 PM	Helium MFC set to  0.000000
8/15/2012	1:05:48 PM	H2 MFC set to  0.000000
8/15/2012	1:05:48 PM	BCl3 MFC set to  0.000000
8/15/2012	1:05:48 PM	PH3 MFC set to  0.000000
8/15/2012	1:05:48 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:05:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:05:48 PM	Tube furnace set to 0
8/15/2012	1:05:49 PM	Run finished at 1:05 PM
8/15/2012	1:05:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	1:05:55 PM	Recipe started at 1:05 PM
8/15/2012	1:05:55 PM	Helium valve closed
8/15/2012	1:05:55 PM	H2 valve closed
8/15/2012	1:05:55 PM	BCl3 valve closed
8/15/2012	1:05:55 PM	PH3 valve closed
8/15/2012	1:05:55 PM	SiCl4 pre valve closed
8/15/2012	1:05:55 PM	SiCl4 post valve closed
8/15/2012	1:05:55 PM	Main Vac valve closed
8/15/2012	1:05:55 PM	Bypass valve closed
8/15/2012	1:05:55 PM	Bubbler valve closed
8/15/2012	1:05:55 PM	Helium MFC set to  0.000000
8/15/2012	1:05:55 PM	H2 MFC set to  0.000000
8/15/2012	1:05:55 PM	BCl3 MFC set to  0.000000
8/15/2012	1:05:55 PM	PH3 MFC set to  0.000000
8/15/2012	1:05:55 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:05:55 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:05:55 PM	Tube furnace set to 0
8/15/2012	1:05:58 PM	H2 valve closed
8/15/2012	1:05:58 PM	BCl3 valve closed
8/15/2012	1:05:58 PM	PH3 valve closed
8/15/2012	1:05:58 PM	SiCl4 pre valve closed
8/15/2012	1:05:58 PM	SiCl4 post valve closed
8/15/2012	1:05:58 PM	Main Vac valve closed
8/15/2012	1:05:58 PM	Bypass valve closed
8/15/2012	1:05:58 PM	Bubbler valve closed
8/15/2012	1:05:58 PM	Helium valve opened
8/15/2012	1:05:58 PM	Helium MFC set to  500.000000
8/15/2012	1:05:58 PM	H2 MFC set to  0.000000
8/15/2012	1:05:58 PM	BCl3 MFC set to  0.000000
8/15/2012	1:05:58 PM	PH3 MFC set to  0.000000
8/15/2012	1:05:58 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:05:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:05:58 PM	Tube furnace set to 0
8/15/2012	1:07:04 PM	Helium valve closed
8/15/2012	1:07:04 PM	H2 valve closed
8/15/2012	1:07:04 PM	BCl3 valve closed
8/15/2012	1:07:04 PM	PH3 valve closed
8/15/2012	1:07:04 PM	SiCl4 pre valve closed
8/15/2012	1:07:04 PM	SiCl4 post valve closed
8/15/2012	1:07:04 PM	Main Vac valve closed
8/15/2012	1:07:04 PM	Bypass valve closed
8/15/2012	1:07:04 PM	Bubbler valve closed
8/15/2012	1:07:04 PM	Helium MFC set to  0.000000
8/15/2012	1:07:04 PM	H2 MFC set to  0.000000
8/15/2012	1:07:04 PM	BCl3 MFC set to  0.000000
8/15/2012	1:07:04 PM	PH3 MFC set to  0.000000
8/15/2012	1:07:04 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:07:04 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:07:04 PM	Tube furnace set to 0
8/15/2012	1:07:05 PM	Run finished at 1:07 PM
8/15/2012	1:07:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	1:13:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	1:13:32 PM	Recipe started at 1:13 PM
8/15/2012	1:13:32 PM	Helium valve closed
8/15/2012	1:13:32 PM	H2 valve closed
8/15/2012	1:13:32 PM	BCl3 valve closed
8/15/2012	1:13:32 PM	PH3 valve closed
8/15/2012	1:13:32 PM	SiCl4 pre valve closed
8/15/2012	1:13:32 PM	SiCl4 post valve closed
8/15/2012	1:13:32 PM	Main Vac valve closed
8/15/2012	1:13:32 PM	Bubbler valve closed
8/15/2012	1:13:32 PM	Bypass valve opened
8/15/2012	1:13:32 PM	Helium MFC set to  0.000000
8/15/2012	1:13:32 PM	H2 MFC set to  0.000000
8/15/2012	1:13:32 PM	BCl3 MFC set to  0.000000
8/15/2012	1:13:32 PM	PH3 MFC set to  0.000000
8/15/2012	1:13:32 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:13:32 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:13:32 PM	Tube furnace set to 0
8/15/2012	1:14:58 PM	Helium valve closed
8/15/2012	1:14:58 PM	H2 valve closed
8/15/2012	1:14:58 PM	BCl3 valve closed
8/15/2012	1:14:58 PM	PH3 valve closed
8/15/2012	1:14:58 PM	SiCl4 pre valve closed
8/15/2012	1:14:58 PM	SiCl4 post valve closed
8/15/2012	1:14:58 PM	Main Vac valve closed
8/15/2012	1:14:58 PM	Bubbler valve closed
8/15/2012	1:14:58 PM	Bypass valve opened
8/15/2012	1:14:58 PM	Helium MFC set to  0.000000
8/15/2012	1:14:58 PM	H2 MFC set to  0.000000
8/15/2012	1:14:58 PM	BCl3 MFC set to  0.000000
8/15/2012	1:14:58 PM	PH3 MFC set to  0.000000
8/15/2012	1:14:58 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:14:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:14:58 PM	Tube furnace set to 0
8/15/2012	1:15:58 PM	Helium valve closed
8/15/2012	1:15:58 PM	H2 valve closed
8/15/2012	1:15:58 PM	BCl3 valve closed
8/15/2012	1:15:58 PM	PH3 valve closed
8/15/2012	1:15:58 PM	SiCl4 pre valve closed
8/15/2012	1:15:58 PM	SiCl4 post valve closed
8/15/2012	1:15:58 PM	Bypass valve closed
8/15/2012	1:15:58 PM	Bubbler valve closed
8/15/2012	1:15:58 PM	Main Vac valve opened
8/15/2012	1:15:58 PM	Helium MFC set to  0.000000
8/15/2012	1:15:58 PM	H2 MFC set to  0.000000
8/15/2012	1:15:58 PM	BCl3 MFC set to  0.000000
8/15/2012	1:15:58 PM	PH3 MFC set to  0.000000
8/15/2012	1:15:58 PM	SiCl4 MFC set to  0.000000
8/15/2012	1:15:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	1:15:58 PM	Tube furnace set to 0
8/15/2012	1:15:59 PM	Run finished at 1:15 PM
8/15/2012	1:15:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	3:05:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	3:05:42 PM	Recipe started at 3:05 PM
8/15/2012	3:05:42 PM	Helium valve closed
8/15/2012	3:05:42 PM	H2 valve closed
8/15/2012	3:05:42 PM	BCl3 valve closed
8/15/2012	3:05:42 PM	PH3 valve closed
8/15/2012	3:05:42 PM	SiCl4 pre valve closed
8/15/2012	3:05:42 PM	SiCl4 post valve closed
8/15/2012	3:05:42 PM	Main Vac valve closed
8/15/2012	3:05:42 PM	Bypass valve closed
8/15/2012	3:05:42 PM	Bubbler valve closed
8/15/2012	3:05:42 PM	Helium MFC set to  0.000000
8/15/2012	3:05:42 PM	H2 MFC set to  0.000000
8/15/2012	3:05:42 PM	BCl3 MFC set to  0.000000
8/15/2012	3:05:42 PM	PH3 MFC set to  0.000000
8/15/2012	3:05:42 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:05:42 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:05:42 PM	Tube furnace set to 0
8/15/2012	3:05:45 PM	H2 valve closed
8/15/2012	3:05:45 PM	BCl3 valve closed
8/15/2012	3:05:45 PM	PH3 valve closed
8/15/2012	3:05:45 PM	SiCl4 pre valve closed
8/15/2012	3:05:45 PM	SiCl4 post valve closed
8/15/2012	3:05:45 PM	Main Vac valve closed
8/15/2012	3:05:45 PM	Bypass valve closed
8/15/2012	3:05:45 PM	Bubbler valve closed
8/15/2012	3:05:45 PM	Helium valve opened
8/15/2012	3:05:45 PM	Helium MFC set to  500.000000
8/15/2012	3:05:45 PM	H2 MFC set to  0.000000
8/15/2012	3:05:45 PM	BCl3 MFC set to  0.000000
8/15/2012	3:05:45 PM	PH3 MFC set to  0.000000
8/15/2012	3:05:45 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:05:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:05:46 PM	Tube furnace set to 0
8/15/2012	3:06:56 PM	Helium valve closed
8/15/2012	3:06:56 PM	H2 valve closed
8/15/2012	3:06:56 PM	BCl3 valve closed
8/15/2012	3:06:56 PM	PH3 valve closed
8/15/2012	3:06:56 PM	SiCl4 pre valve closed
8/15/2012	3:06:56 PM	SiCl4 post valve closed
8/15/2012	3:06:56 PM	Main Vac valve closed
8/15/2012	3:06:56 PM	Bypass valve closed
8/15/2012	3:06:56 PM	Bubbler valve closed
8/15/2012	3:06:56 PM	Helium MFC set to  0.000000
8/15/2012	3:06:56 PM	H2 MFC set to  0.000000
8/15/2012	3:06:56 PM	BCl3 MFC set to  0.000000
8/15/2012	3:06:56 PM	PH3 MFC set to  0.000000
8/15/2012	3:06:56 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:06:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:06:56 PM	Tube furnace set to 0
8/15/2012	3:06:57 PM	Run finished at 3:06 PM
8/15/2012	3:06:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	3:09:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	3:09:26 PM	Recipe started at 3:09 PM
8/15/2012	3:09:26 PM	Helium valve closed
8/15/2012	3:09:26 PM	H2 valve closed
8/15/2012	3:09:26 PM	BCl3 valve closed
8/15/2012	3:09:26 PM	PH3 valve closed
8/15/2012	3:09:26 PM	SiCl4 pre valve closed
8/15/2012	3:09:26 PM	SiCl4 post valve closed
8/15/2012	3:09:26 PM	Main Vac valve closed
8/15/2012	3:09:26 PM	Bubbler valve closed
8/15/2012	3:09:26 PM	Bypass valve opened
8/15/2012	3:09:26 PM	Helium MFC set to  0.000000
8/15/2012	3:09:26 PM	H2 MFC set to  0.000000
8/15/2012	3:09:26 PM	BCl3 MFC set to  0.000000
8/15/2012	3:09:26 PM	PH3 MFC set to  0.000000
8/15/2012	3:09:26 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:09:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:09:26 PM	Tube furnace set to 0
8/15/2012	3:10:44 PM	Helium valve closed
8/15/2012	3:10:44 PM	H2 valve closed
8/15/2012	3:10:44 PM	BCl3 valve closed
8/15/2012	3:10:44 PM	PH3 valve closed
8/15/2012	3:10:44 PM	SiCl4 pre valve closed
8/15/2012	3:10:44 PM	SiCl4 post valve closed
8/15/2012	3:10:44 PM	Main Vac valve closed
8/15/2012	3:10:44 PM	Bubbler valve closed
8/15/2012	3:10:44 PM	Bypass valve opened
8/15/2012	3:10:44 PM	Helium MFC set to  0.000000
8/15/2012	3:10:44 PM	H2 MFC set to  0.000000
8/15/2012	3:10:44 PM	BCl3 MFC set to  0.000000
8/15/2012	3:10:44 PM	PH3 MFC set to  0.000000
8/15/2012	3:10:44 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:10:44 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:10:44 PM	Tube furnace set to 0
8/15/2012	3:11:44 PM	Helium valve closed
8/15/2012	3:11:44 PM	H2 valve closed
8/15/2012	3:11:44 PM	BCl3 valve closed
8/15/2012	3:11:44 PM	PH3 valve closed
8/15/2012	3:11:44 PM	SiCl4 pre valve closed
8/15/2012	3:11:44 PM	SiCl4 post valve closed
8/15/2012	3:11:44 PM	Bypass valve closed
8/15/2012	3:11:44 PM	Bubbler valve closed
8/15/2012	3:11:44 PM	Main Vac valve opened
8/15/2012	3:11:44 PM	Helium MFC set to  0.000000
8/15/2012	3:11:44 PM	H2 MFC set to  0.000000
8/15/2012	3:11:44 PM	BCl3 MFC set to  0.000000
8/15/2012	3:11:44 PM	PH3 MFC set to  0.000000
8/15/2012	3:11:44 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:11:44 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:11:44 PM	Tube furnace set to 0
8/15/2012	3:11:45 PM	Run finished at 3:11 PM
8/15/2012	3:11:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	3:48:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	3:48:49 PM	Recipe started at 3:48 PM
8/15/2012	3:48:49 PM	Helium valve closed
8/15/2012	3:48:49 PM	H2 valve closed
8/15/2012	3:48:49 PM	BCl3 valve closed
8/15/2012	3:48:49 PM	PH3 valve closed
8/15/2012	3:48:49 PM	SiCl4 pre valve closed
8/15/2012	3:48:49 PM	SiCl4 post valve closed
8/15/2012	3:48:49 PM	Main Vac valve closed
8/15/2012	3:48:49 PM	Bypass valve closed
8/15/2012	3:48:49 PM	Bubbler valve closed
8/15/2012	3:48:49 PM	Helium MFC set to  0.000000
8/15/2012	3:48:49 PM	H2 MFC set to  0.000000
8/15/2012	3:48:49 PM	BCl3 MFC set to  0.000000
8/15/2012	3:48:49 PM	PH3 MFC set to  0.000000
8/15/2012	3:48:49 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:48:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:48:49 PM	Tube furnace set to 0
8/15/2012	3:48:49 PM	Run finished at 3:48 PM
8/15/2012	3:48:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/15/2012	3:49:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	3:49:02 PM	Recipe started at 3:49 PM
8/15/2012	3:49:02 PM	Helium valve closed
8/15/2012	3:49:02 PM	H2 valve closed
8/15/2012	3:49:02 PM	BCl3 valve closed
8/15/2012	3:49:02 PM	PH3 valve closed
8/15/2012	3:49:02 PM	SiCl4 pre valve closed
8/15/2012	3:49:02 PM	SiCl4 post valve closed
8/15/2012	3:49:02 PM	Main Vac valve closed
8/15/2012	3:49:02 PM	Bubbler valve closed
8/15/2012	3:49:02 PM	Bypass valve opened
8/15/2012	3:49:02 PM	Helium MFC set to  0.000000
8/15/2012	3:49:02 PM	H2 MFC set to  0.000000
8/15/2012	3:49:02 PM	BCl3 MFC set to  0.000000
8/15/2012	3:49:02 PM	PH3 MFC set to  0.000000
8/15/2012	3:49:02 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:49:02 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:49:02 PM	Tube furnace set to 0
8/15/2012	3:49:02 PM	Helium valve closed
8/15/2012	3:49:02 PM	H2 valve closed
8/15/2012	3:49:02 PM	BCl3 valve closed
8/15/2012	3:49:02 PM	PH3 valve closed
8/15/2012	3:49:02 PM	SiCl4 pre valve closed
8/15/2012	3:49:02 PM	SiCl4 post valve closed
8/15/2012	3:49:02 PM	Main Vac valve closed
8/15/2012	3:49:02 PM	Bubbler valve closed
8/15/2012	3:49:02 PM	Bypass valve opened
8/15/2012	3:49:02 PM	Helium MFC set to  0.000000
8/15/2012	3:49:02 PM	H2 MFC set to  0.000000
8/15/2012	3:49:02 PM	BCl3 MFC set to  0.000000
8/15/2012	3:49:02 PM	PH3 MFC set to  0.000000
8/15/2012	3:49:02 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:49:02 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:49:02 PM	Tube furnace set to 0
8/15/2012	3:49:03 PM	Helium valve closed
8/15/2012	3:49:03 PM	H2 valve closed
8/15/2012	3:49:03 PM	BCl3 valve closed
8/15/2012	3:49:03 PM	PH3 valve closed
8/15/2012	3:49:03 PM	SiCl4 pre valve closed
8/15/2012	3:49:03 PM	SiCl4 post valve closed
8/15/2012	3:49:03 PM	Bypass valve closed
8/15/2012	3:49:03 PM	Bubbler valve closed
8/15/2012	3:49:03 PM	Main Vac valve opened
8/15/2012	3:49:03 PM	Helium MFC set to  0.000000
8/15/2012	3:49:03 PM	H2 MFC set to  0.000000
8/15/2012	3:49:03 PM	BCl3 MFC set to  0.000000
8/15/2012	3:49:03 PM	PH3 MFC set to  0.000000
8/15/2012	3:49:03 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:49:03 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:49:03 PM	Tube furnace set to 0
8/15/2012	3:49:04 PM	Run finished at 3:49 PM
8/15/2012	3:49:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	3:49:18 PM	Recipe started at 3:49 PM
8/15/2012	3:49:18 PM	Helium valve closed
8/15/2012	3:49:18 PM	H2 valve closed
8/15/2012	3:49:18 PM	BCl3 valve closed
8/15/2012	3:49:18 PM	PH3 valve closed
8/15/2012	3:49:18 PM	SiCl4 pre valve closed
8/15/2012	3:49:18 PM	SiCl4 post valve closed
8/15/2012	3:49:18 PM	Main Vac valve closed
8/15/2012	3:49:18 PM	Bypass valve closed
8/15/2012	3:49:18 PM	Bubbler valve closed
8/15/2012	3:49:18 PM	Helium MFC set to  0.000000
8/15/2012	3:49:18 PM	H2 MFC set to  0.000000
8/15/2012	3:49:18 PM	BCl3 MFC set to  0.000000
8/15/2012	3:49:18 PM	PH3 MFC set to  0.000000
8/15/2012	3:49:18 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:49:18 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:49:18 PM	Tube furnace set to 0
8/15/2012	3:49:21 PM	Helium valve closed
8/15/2012	3:49:21 PM	BCl3 valve closed
8/15/2012	3:49:21 PM	PH3 valve closed
8/15/2012	3:49:21 PM	SiCl4 pre valve closed
8/15/2012	3:49:21 PM	SiCl4 post valve closed
8/15/2012	3:49:21 PM	Main Vac valve closed
8/15/2012	3:49:21 PM	Bypass valve closed
8/15/2012	3:49:21 PM	Bubbler valve closed
8/15/2012	3:49:21 PM	H2 valve opened
8/15/2012	3:49:21 PM	Helium MFC set to  0.000000
8/15/2012	3:49:21 PM	H2 MFC set to  500.000000
8/15/2012	3:49:21 PM	BCl3 MFC set to  0.000000
8/15/2012	3:49:21 PM	PH3 MFC set to  0.000000
8/15/2012	3:49:21 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:49:21 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:49:21 PM	Tube furnace set to 50
8/15/2012	3:50:35 PM	Helium valve closed
8/15/2012	3:50:35 PM	BCl3 valve closed
8/15/2012	3:50:35 PM	PH3 valve closed
8/15/2012	3:50:35 PM	SiCl4 pre valve closed
8/15/2012	3:50:35 PM	SiCl4 post valve closed
8/15/2012	3:50:35 PM	Main Vac valve closed
8/15/2012	3:50:35 PM	Bypass valve closed
8/15/2012	3:50:35 PM	H2 valve opened
8/15/2012	3:50:35 PM	Bubbler valve opened
8/15/2012	3:50:35 PM	Helium MFC set to  0.000000
8/15/2012	3:50:35 PM	H2 MFC set to  500.000000
8/15/2012	3:50:35 PM	BCl3 MFC set to  0.000000
8/15/2012	3:50:35 PM	PH3 MFC set to  0.000000
8/15/2012	3:50:35 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:50:35 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:50:35 PM	Tube furnace set to 50
8/15/2012	3:50:36 PM	Helium valve closed
8/15/2012	3:50:36 PM	BCl3 valve closed
8/15/2012	3:50:36 PM	PH3 valve closed
8/15/2012	3:50:36 PM	SiCl4 pre valve closed
8/15/2012	3:50:36 PM	SiCl4 post valve closed
8/15/2012	3:50:36 PM	Main Vac valve closed
8/15/2012	3:50:36 PM	Bypass valve closed
8/15/2012	3:50:36 PM	H2 valve opened
8/15/2012	3:50:36 PM	Bubbler valve opened
8/15/2012	3:50:36 PM	Helium MFC set to  0.000000
8/15/2012	3:50:36 PM	H2 MFC set to  500.000000
8/15/2012	3:50:36 PM	BCl3 MFC set to  0.000000
8/15/2012	3:50:36 PM	PH3 MFC set to  0.000000
8/15/2012	3:50:36 PM	SiCl4 MFC set to  0.000000
8/15/2012	3:50:36 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	3:50:37 PM	Tube furnace set to 1000
8/15/2012	4:10:37 PM	Helium valve closed
8/15/2012	4:10:37 PM	PH3 valve closed
8/15/2012	4:10:37 PM	Main Vac valve closed
8/15/2012	4:10:37 PM	Bypass valve closed
8/15/2012	4:10:37 PM	H2 valve opened
8/15/2012	4:10:37 PM	BCl3 valve opened
8/15/2012	4:10:37 PM	SiCl4 pre valve opened
8/15/2012	4:10:37 PM	SiCl4 post valve opened
8/15/2012	4:10:37 PM	Bubbler valve opened
8/15/2012	4:10:37 PM	Helium MFC set to  0.000000
8/15/2012	4:10:37 PM	H2 MFC set to  500.000000
8/15/2012	4:10:37 PM	BCl3 MFC set to  1.000000
8/15/2012	4:10:37 PM	PH3 MFC set to  0.000000
8/15/2012	4:10:37 PM	SiCl4 MFC set to  50.000000
8/15/2012	4:10:37 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:10:37 PM	Tube furnace set to 1000
8/15/2012	4:30:37 PM	Helium valve closed
8/15/2012	4:30:37 PM	BCl3 valve closed
8/15/2012	4:30:37 PM	PH3 valve closed
8/15/2012	4:30:37 PM	SiCl4 pre valve closed
8/15/2012	4:30:37 PM	SiCl4 post valve closed
8/15/2012	4:30:37 PM	Main Vac valve closed
8/15/2012	4:30:37 PM	Bypass valve closed
8/15/2012	4:30:37 PM	H2 valve opened
8/15/2012	4:30:37 PM	Bubbler valve opened
8/15/2012	4:30:37 PM	Helium MFC set to  0.000000
8/15/2012	4:30:37 PM	H2 MFC set to  500.000000
8/15/2012	4:30:37 PM	BCl3 MFC set to  0.000000
8/15/2012	4:30:37 PM	PH3 MFC set to  0.000000
8/15/2012	4:30:37 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:30:37 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:30:37 PM	Tube furnace set to 950
8/15/2012	4:33:37 PM	Helium valve closed
8/15/2012	4:33:37 PM	BCl3 valve closed
8/15/2012	4:33:37 PM	PH3 valve closed
8/15/2012	4:33:37 PM	SiCl4 pre valve closed
8/15/2012	4:33:37 PM	SiCl4 post valve closed
8/15/2012	4:33:37 PM	Main Vac valve closed
8/15/2012	4:33:37 PM	Bypass valve closed
8/15/2012	4:33:37 PM	H2 valve opened
8/15/2012	4:33:37 PM	Bubbler valve opened
8/15/2012	4:33:37 PM	Helium MFC set to  0.000000
8/15/2012	4:33:37 PM	H2 MFC set to  500.000000
8/15/2012	4:33:37 PM	BCl3 MFC set to  0.000000
8/15/2012	4:33:37 PM	PH3 MFC set to  0.000000
8/15/2012	4:33:37 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:33:37 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:33:37 PM	Tube furnace set to 900
8/15/2012	4:36:37 PM	Helium valve closed
8/15/2012	4:36:37 PM	BCl3 valve closed
8/15/2012	4:36:37 PM	PH3 valve closed
8/15/2012	4:36:37 PM	SiCl4 pre valve closed
8/15/2012	4:36:37 PM	SiCl4 post valve closed
8/15/2012	4:36:37 PM	Main Vac valve closed
8/15/2012	4:36:37 PM	Bypass valve closed
8/15/2012	4:36:37 PM	H2 valve opened
8/15/2012	4:36:37 PM	Bubbler valve opened
8/15/2012	4:36:37 PM	Helium MFC set to  0.000000
8/15/2012	4:36:37 PM	H2 MFC set to  500.000000
8/15/2012	4:36:37 PM	BCl3 MFC set to  0.000000
8/15/2012	4:36:37 PM	PH3 MFC set to  0.000000
8/15/2012	4:36:37 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:36:37 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:36:37 PM	Tube furnace set to 850
8/15/2012	4:39:37 PM	Helium valve closed
8/15/2012	4:39:37 PM	BCl3 valve closed
8/15/2012	4:39:37 PM	PH3 valve closed
8/15/2012	4:39:37 PM	SiCl4 pre valve closed
8/15/2012	4:39:37 PM	SiCl4 post valve closed
8/15/2012	4:39:37 PM	Main Vac valve closed
8/15/2012	4:39:38 PM	Bypass valve closed
8/15/2012	4:39:38 PM	H2 valve opened
8/15/2012	4:39:38 PM	Bubbler valve opened
8/15/2012	4:39:38 PM	Helium MFC set to  0.000000
8/15/2012	4:39:38 PM	H2 MFC set to  500.000000
8/15/2012	4:39:38 PM	BCl3 MFC set to  0.000000
8/15/2012	4:39:38 PM	PH3 MFC set to  0.000000
8/15/2012	4:39:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:39:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:39:38 PM	Tube furnace set to 800
8/15/2012	4:42:38 PM	Helium valve closed
8/15/2012	4:42:38 PM	BCl3 valve closed
8/15/2012	4:42:38 PM	PH3 valve closed
8/15/2012	4:42:38 PM	SiCl4 pre valve closed
8/15/2012	4:42:38 PM	SiCl4 post valve closed
8/15/2012	4:42:38 PM	Main Vac valve closed
8/15/2012	4:42:38 PM	Bypass valve closed
8/15/2012	4:42:38 PM	H2 valve opened
8/15/2012	4:42:38 PM	Bubbler valve opened
8/15/2012	4:42:38 PM	Helium MFC set to  0.000000
8/15/2012	4:42:38 PM	H2 MFC set to  500.000000
8/15/2012	4:42:38 PM	BCl3 MFC set to  0.000000
8/15/2012	4:42:38 PM	PH3 MFC set to  0.000000
8/15/2012	4:42:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:42:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:42:38 PM	Tube furnace set to 750
8/15/2012	4:45:38 PM	H2 valve closed
8/15/2012	4:45:38 PM	BCl3 valve closed
8/15/2012	4:45:38 PM	PH3 valve closed
8/15/2012	4:45:38 PM	SiCl4 pre valve closed
8/15/2012	4:45:38 PM	SiCl4 post valve closed
8/15/2012	4:45:38 PM	Main Vac valve closed
8/15/2012	4:45:38 PM	Bypass valve closed
8/15/2012	4:45:38 PM	Helium valve opened
8/15/2012	4:45:38 PM	Bubbler valve opened
8/15/2012	4:45:38 PM	Helium MFC set to  400.000000
8/15/2012	4:45:38 PM	H2 MFC set to  0.000000
8/15/2012	4:45:38 PM	BCl3 MFC set to  0.000000
8/15/2012	4:45:38 PM	PH3 MFC set to  0.000000
8/15/2012	4:45:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:45:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:45:38 PM	Tube furnace set to 0
8/15/2012	4:59:41 PM	Helium valve closed
8/15/2012	4:59:41 PM	H2 valve closed
8/15/2012	4:59:41 PM	BCl3 valve closed
8/15/2012	4:59:41 PM	PH3 valve closed
8/15/2012	4:59:41 PM	SiCl4 pre valve closed
8/15/2012	4:59:41 PM	SiCl4 post valve closed
8/15/2012	4:59:41 PM	Main Vac valve closed
8/15/2012	4:59:41 PM	Bypass valve closed
8/15/2012	4:59:41 PM	Bubbler valve closed
8/15/2012	4:59:41 PM	Helium MFC set to  0.000000
8/15/2012	4:59:41 PM	H2 MFC set to  0.000000
8/15/2012	4:59:41 PM	BCl3 MFC set to  0.000000
8/15/2012	4:59:41 PM	PH3 MFC set to  0.000000
8/15/2012	4:59:41 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:59:41 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:59:41 PM	Tube furnace set to 50
8/15/2012	4:59:45 PM	Helium valve closed
8/15/2012	4:59:45 PM	H2 valve closed
8/15/2012	4:59:45 PM	BCl3 valve closed
8/15/2012	4:59:45 PM	PH3 valve closed
8/15/2012	4:59:45 PM	SiCl4 pre valve closed
8/15/2012	4:59:45 PM	SiCl4 post valve closed
8/15/2012	4:59:45 PM	Main Vac valve closed
8/15/2012	4:59:45 PM	Bubbler valve closed
8/15/2012	4:59:45 PM	Bypass valve opened
8/15/2012	4:59:45 PM	Helium MFC set to  0.000000
8/15/2012	4:59:45 PM	H2 MFC set to  0.000000
8/15/2012	4:59:45 PM	BCl3 MFC set to  0.000000
8/15/2012	4:59:45 PM	PH3 MFC set to  0.000000
8/15/2012	4:59:45 PM	SiCl4 MFC set to  0.000000
8/15/2012	4:59:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	4:59:45 PM	Tube furnace set to 0
8/15/2012	5:00:49 PM	Helium valve closed
8/15/2012	5:00:49 PM	H2 valve closed
8/15/2012	5:00:49 PM	BCl3 valve closed
8/15/2012	5:00:49 PM	PH3 valve closed
8/15/2012	5:00:49 PM	SiCl4 pre valve closed
8/15/2012	5:00:49 PM	SiCl4 post valve closed
8/15/2012	5:00:49 PM	Bypass valve closed
8/15/2012	5:00:49 PM	Bubbler valve closed
8/15/2012	5:00:49 PM	Main Vac valve opened
8/15/2012	5:00:49 PM	Helium MFC set to  0.000000
8/15/2012	5:00:49 PM	H2 MFC set to  0.000000
8/15/2012	5:00:49 PM	BCl3 MFC set to  0.000000
8/15/2012	5:00:49 PM	PH3 MFC set to  0.000000
8/15/2012	5:00:49 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:00:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:00:49 PM	Tube furnace set to 0
8/15/2012	5:00:50 PM	Run finished at 5:00 PM
8/15/2012	5:01:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	5:01:23 PM	Recipe started at 5:01 PM
8/15/2012	5:01:23 PM	Helium valve closed
8/15/2012	5:01:23 PM	H2 valve closed
8/15/2012	5:01:23 PM	BCl3 valve closed
8/15/2012	5:01:23 PM	PH3 valve closed
8/15/2012	5:01:23 PM	SiCl4 pre valve closed
8/15/2012	5:01:23 PM	SiCl4 post valve closed
8/15/2012	5:01:23 PM	Main Vac valve closed
8/15/2012	5:01:23 PM	Bypass valve closed
8/15/2012	5:01:23 PM	Bubbler valve closed
8/15/2012	5:01:23 PM	Helium MFC set to  0.000000
8/15/2012	5:01:23 PM	H2 MFC set to  0.000000
8/15/2012	5:01:23 PM	BCl3 MFC set to  0.000000
8/15/2012	5:01:23 PM	PH3 MFC set to  0.000000
8/15/2012	5:01:23 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:01:23 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:01:23 PM	Tube furnace set to 0
8/15/2012	5:01:26 PM	H2 valve closed
8/15/2012	5:01:26 PM	BCl3 valve closed
8/15/2012	5:01:26 PM	PH3 valve closed
8/15/2012	5:01:26 PM	SiCl4 pre valve closed
8/15/2012	5:01:26 PM	SiCl4 post valve closed
8/15/2012	5:01:26 PM	Main Vac valve closed
8/15/2012	5:01:26 PM	Bypass valve closed
8/15/2012	5:01:26 PM	Bubbler valve closed
8/15/2012	5:01:26 PM	Helium valve opened
8/15/2012	5:01:26 PM	Helium MFC set to  500.000000
8/15/2012	5:01:26 PM	H2 MFC set to  0.000000
8/15/2012	5:01:26 PM	BCl3 MFC set to  0.000000
8/15/2012	5:01:26 PM	PH3 MFC set to  0.000000
8/15/2012	5:01:26 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:01:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:01:26 PM	Tube furnace set to 0
8/15/2012	5:02:35 PM	Helium valve closed
8/15/2012	5:02:35 PM	H2 valve closed
8/15/2012	5:02:35 PM	BCl3 valve closed
8/15/2012	5:02:35 PM	PH3 valve closed
8/15/2012	5:02:35 PM	SiCl4 pre valve closed
8/15/2012	5:02:35 PM	SiCl4 post valve closed
8/15/2012	5:02:35 PM	Main Vac valve closed
8/15/2012	5:02:35 PM	Bypass valve closed
8/15/2012	5:02:35 PM	Bubbler valve closed
8/15/2012	5:02:35 PM	Helium MFC set to  0.000000
8/15/2012	5:02:35 PM	H2 MFC set to  0.000000
8/15/2012	5:02:35 PM	BCl3 MFC set to  0.000000
8/15/2012	5:02:35 PM	PH3 MFC set to  0.000000
8/15/2012	5:02:35 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:02:35 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:02:36 PM	Tube furnace set to 0
8/15/2012	5:02:37 PM	Run finished at 5:02 PM
8/15/2012	5:02:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	5:11:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	5:11:12 PM	Recipe started at 5:11 PM
8/15/2012	5:11:12 PM	Helium valve closed
8/15/2012	5:11:12 PM	H2 valve closed
8/15/2012	5:11:12 PM	BCl3 valve closed
8/15/2012	5:11:12 PM	PH3 valve closed
8/15/2012	5:11:12 PM	SiCl4 pre valve closed
8/15/2012	5:11:12 PM	SiCl4 post valve closed
8/15/2012	5:11:12 PM	Main Vac valve closed
8/15/2012	5:11:12 PM	Bubbler valve closed
8/15/2012	5:11:12 PM	Bypass valve opened
8/15/2012	5:11:12 PM	Helium MFC set to  0.000000
8/15/2012	5:11:12 PM	H2 MFC set to  0.000000
8/15/2012	5:11:12 PM	BCl3 MFC set to  0.000000
8/15/2012	5:11:12 PM	PH3 MFC set to  0.000000
8/15/2012	5:11:12 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:11:12 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:11:12 PM	Tube furnace set to 0
8/15/2012	5:12:40 PM	Helium valve closed
8/15/2012	5:12:40 PM	H2 valve closed
8/15/2012	5:12:40 PM	BCl3 valve closed
8/15/2012	5:12:40 PM	PH3 valve closed
8/15/2012	5:12:40 PM	SiCl4 pre valve closed
8/15/2012	5:12:40 PM	SiCl4 post valve closed
8/15/2012	5:12:40 PM	Main Vac valve closed
8/15/2012	5:12:40 PM	Bubbler valve closed
8/15/2012	5:12:40 PM	Bypass valve opened
8/15/2012	5:12:40 PM	Helium MFC set to  0.000000
8/15/2012	5:12:40 PM	H2 MFC set to  0.000000
8/15/2012	5:12:40 PM	BCl3 MFC set to  0.000000
8/15/2012	5:12:40 PM	PH3 MFC set to  0.000000
8/15/2012	5:12:40 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:12:40 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:12:40 PM	Tube furnace set to 0
8/15/2012	5:13:40 PM	Helium valve closed
8/15/2012	5:13:40 PM	H2 valve closed
8/15/2012	5:13:40 PM	BCl3 valve closed
8/15/2012	5:13:40 PM	PH3 valve closed
8/15/2012	5:13:40 PM	SiCl4 pre valve closed
8/15/2012	5:13:40 PM	SiCl4 post valve closed
8/15/2012	5:13:40 PM	Bypass valve closed
8/15/2012	5:13:40 PM	Bubbler valve closed
8/15/2012	5:13:40 PM	Main Vac valve opened
8/15/2012	5:13:40 PM	Helium MFC set to  0.000000
8/15/2012	5:13:40 PM	H2 MFC set to  0.000000
8/15/2012	5:13:40 PM	BCl3 MFC set to  0.000000
8/15/2012	5:13:40 PM	PH3 MFC set to  0.000000
8/15/2012	5:13:40 PM	SiCl4 MFC set to  0.000000
8/15/2012	5:13:40 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	5:13:41 PM	Tube furnace set to 0
8/15/2012	5:13:42 PM	Run finished at 5:13 PM
8/15/2012	5:13:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	6:36:13 PM	Recipe started at 6:36 PM
8/15/2012	6:36:13 PM	Helium valve closed
8/15/2012	6:36:13 PM	H2 valve closed
8/15/2012	6:36:13 PM	BCl3 valve closed
8/15/2012	6:36:13 PM	PH3 valve closed
8/15/2012	6:36:13 PM	SiCl4 pre valve closed
8/15/2012	6:36:13 PM	SiCl4 post valve closed
8/15/2012	6:36:13 PM	Main Vac valve closed
8/15/2012	6:36:14 PM	Bypass valve closed
8/15/2012	6:36:14 PM	Bubbler valve closed
8/15/2012	6:36:14 PM	Helium MFC set to  0.000000
8/15/2012	6:36:14 PM	H2 MFC set to  0.000000
8/15/2012	6:36:14 PM	BCl3 MFC set to  0.000000
8/15/2012	6:36:14 PM	PH3 MFC set to  0.000000
8/15/2012	6:36:14 PM	SiCl4 MFC set to  0.000000
8/15/2012	6:36:14 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	6:36:14 PM	Tube furnace set to 0
8/15/2012	6:36:17 PM	Helium valve closed
8/15/2012	6:36:17 PM	BCl3 valve closed
8/15/2012	6:36:17 PM	PH3 valve closed
8/15/2012	6:36:17 PM	SiCl4 pre valve closed
8/15/2012	6:36:17 PM	SiCl4 post valve closed
8/15/2012	6:36:17 PM	Main Vac valve closed
8/15/2012	6:36:17 PM	Bypass valve closed
8/15/2012	6:36:17 PM	Bubbler valve closed
8/15/2012	6:36:17 PM	H2 valve opened
8/15/2012	6:36:17 PM	Helium MFC set to  0.000000
8/15/2012	6:36:17 PM	H2 MFC set to  500.000000
8/15/2012	6:36:17 PM	BCl3 MFC set to  0.000000
8/15/2012	6:36:17 PM	PH3 MFC set to  0.000000
8/15/2012	6:36:17 PM	SiCl4 MFC set to  0.000000
8/15/2012	6:36:17 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	6:36:17 PM	Tube furnace set to 50
8/15/2012	6:37:29 PM	Helium valve closed
8/15/2012	6:37:29 PM	BCl3 valve closed
8/15/2012	6:37:29 PM	PH3 valve closed
8/15/2012	6:37:29 PM	SiCl4 pre valve closed
8/15/2012	6:37:29 PM	SiCl4 post valve closed
8/15/2012	6:37:29 PM	Main Vac valve closed
8/15/2012	6:37:29 PM	Bypass valve closed
8/15/2012	6:37:29 PM	H2 valve opened
8/15/2012	6:37:29 PM	Bubbler valve opened
8/15/2012	6:37:29 PM	Helium MFC set to  0.000000
8/15/2012	6:37:29 PM	H2 MFC set to  500.000000
8/15/2012	6:37:29 PM	BCl3 MFC set to  0.000000
8/15/2012	6:37:29 PM	PH3 MFC set to  0.000000
8/15/2012	6:37:29 PM	SiCl4 MFC set to  0.000000
8/15/2012	6:37:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	6:37:30 PM	Tube furnace set to 50
8/15/2012	6:37:31 PM	Helium valve closed
8/15/2012	6:37:31 PM	BCl3 valve closed
8/15/2012	6:37:31 PM	PH3 valve closed
8/15/2012	6:37:31 PM	SiCl4 pre valve closed
8/15/2012	6:37:31 PM	SiCl4 post valve closed
8/15/2012	6:37:31 PM	Main Vac valve closed
8/15/2012	6:37:31 PM	Bypass valve closed
8/15/2012	6:37:31 PM	H2 valve opened
8/15/2012	6:37:31 PM	Bubbler valve opened
8/15/2012	6:37:31 PM	Helium MFC set to  0.000000
8/15/2012	6:37:31 PM	H2 MFC set to  500.000000
8/15/2012	6:37:31 PM	BCl3 MFC set to  0.000000
8/15/2012	6:37:31 PM	PH3 MFC set to  0.000000
8/15/2012	6:37:31 PM	SiCl4 MFC set to  0.000000
8/15/2012	6:37:31 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	6:37:31 PM	Tube furnace set to 1000
8/15/2012	6:57:31 PM	Helium valve closed
8/15/2012	6:57:31 PM	PH3 valve closed
8/15/2012	6:57:31 PM	Main Vac valve closed
8/15/2012	6:57:31 PM	Bypass valve closed
8/15/2012	6:57:31 PM	H2 valve opened
8/15/2012	6:57:31 PM	BCl3 valve opened
8/15/2012	6:57:31 PM	SiCl4 pre valve opened
8/15/2012	6:57:31 PM	SiCl4 post valve opened
8/15/2012	6:57:31 PM	Bubbler valve opened
8/15/2012	6:57:31 PM	Helium MFC set to  0.000000
8/15/2012	6:57:31 PM	H2 MFC set to  500.000000
8/15/2012	6:57:31 PM	BCl3 MFC set to  1.000000
8/15/2012	6:57:31 PM	PH3 MFC set to  0.000000
8/15/2012	6:57:31 PM	SiCl4 MFC set to  50.000000
8/15/2012	6:57:31 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	6:57:31 PM	Tube furnace set to 1000
8/15/2012	7:17:31 PM	Helium valve closed
8/15/2012	7:17:31 PM	BCl3 valve closed
8/15/2012	7:17:31 PM	PH3 valve closed
8/15/2012	7:17:31 PM	SiCl4 pre valve closed
8/15/2012	7:17:31 PM	SiCl4 post valve closed
8/15/2012	7:17:31 PM	Main Vac valve closed
8/15/2012	7:17:31 PM	Bypass valve closed
8/15/2012	7:17:31 PM	H2 valve opened
8/15/2012	7:17:31 PM	Bubbler valve opened
8/15/2012	7:17:31 PM	Helium MFC set to  0.000000
8/15/2012	7:17:31 PM	H2 MFC set to  500.000000
8/15/2012	7:17:31 PM	BCl3 MFC set to  0.000000
8/15/2012	7:17:31 PM	PH3 MFC set to  0.000000
8/15/2012	7:17:31 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:17:31 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:17:31 PM	Tube furnace set to 950
8/15/2012	7:20:31 PM	Helium valve closed
8/15/2012	7:20:31 PM	BCl3 valve closed
8/15/2012	7:20:31 PM	PH3 valve closed
8/15/2012	7:20:31 PM	SiCl4 pre valve closed
8/15/2012	7:20:31 PM	SiCl4 post valve closed
8/15/2012	7:20:31 PM	Main Vac valve closed
8/15/2012	7:20:31 PM	Bypass valve closed
8/15/2012	7:20:31 PM	H2 valve opened
8/15/2012	7:20:31 PM	Bubbler valve opened
8/15/2012	7:20:31 PM	Helium MFC set to  0.000000
8/15/2012	7:20:31 PM	H2 MFC set to  500.000000
8/15/2012	7:20:31 PM	BCl3 MFC set to  0.000000
8/15/2012	7:20:31 PM	PH3 MFC set to  0.000000
8/15/2012	7:20:31 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:20:31 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:20:32 PM	Tube furnace set to 900
8/15/2012	7:23:32 PM	Helium valve closed
8/15/2012	7:23:32 PM	BCl3 valve closed
8/15/2012	7:23:32 PM	PH3 valve closed
8/15/2012	7:23:32 PM	SiCl4 pre valve closed
8/15/2012	7:23:32 PM	SiCl4 post valve closed
8/15/2012	7:23:32 PM	Main Vac valve closed
8/15/2012	7:23:32 PM	Bypass valve closed
8/15/2012	7:23:32 PM	H2 valve opened
8/15/2012	7:23:32 PM	Bubbler valve opened
8/15/2012	7:23:32 PM	Helium MFC set to  0.000000
8/15/2012	7:23:32 PM	H2 MFC set to  500.000000
8/15/2012	7:23:32 PM	BCl3 MFC set to  0.000000
8/15/2012	7:23:32 PM	PH3 MFC set to  0.000000
8/15/2012	7:23:32 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:23:32 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:23:32 PM	Tube furnace set to 850
8/15/2012	7:26:32 PM	Helium valve closed
8/15/2012	7:26:32 PM	BCl3 valve closed
8/15/2012	7:26:32 PM	PH3 valve closed
8/15/2012	7:26:32 PM	SiCl4 pre valve closed
8/15/2012	7:26:32 PM	SiCl4 post valve closed
8/15/2012	7:26:32 PM	Main Vac valve closed
8/15/2012	7:26:32 PM	Bypass valve closed
8/15/2012	7:26:32 PM	H2 valve opened
8/15/2012	7:26:32 PM	Bubbler valve opened
8/15/2012	7:26:32 PM	Helium MFC set to  0.000000
8/15/2012	7:26:32 PM	H2 MFC set to  500.000000
8/15/2012	7:26:32 PM	BCl3 MFC set to  0.000000
8/15/2012	7:26:32 PM	PH3 MFC set to  0.000000
8/15/2012	7:26:32 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:26:32 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:26:32 PM	Tube furnace set to 800
8/15/2012	7:29:32 PM	Helium valve closed
8/15/2012	7:29:32 PM	BCl3 valve closed
8/15/2012	7:29:32 PM	PH3 valve closed
8/15/2012	7:29:32 PM	SiCl4 pre valve closed
8/15/2012	7:29:32 PM	SiCl4 post valve closed
8/15/2012	7:29:32 PM	Main Vac valve closed
8/15/2012	7:29:32 PM	Bypass valve closed
8/15/2012	7:29:32 PM	H2 valve opened
8/15/2012	7:29:32 PM	Bubbler valve opened
8/15/2012	7:29:32 PM	Helium MFC set to  0.000000
8/15/2012	7:29:32 PM	H2 MFC set to  500.000000
8/15/2012	7:29:32 PM	BCl3 MFC set to  0.000000
8/15/2012	7:29:32 PM	PH3 MFC set to  0.000000
8/15/2012	7:29:32 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:29:32 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:29:32 PM	Tube furnace set to 750
8/15/2012	7:32:32 PM	H2 valve closed
8/15/2012	7:32:32 PM	BCl3 valve closed
8/15/2012	7:32:32 PM	PH3 valve closed
8/15/2012	7:32:32 PM	SiCl4 pre valve closed
8/15/2012	7:32:32 PM	SiCl4 post valve closed
8/15/2012	7:32:32 PM	Main Vac valve closed
8/15/2012	7:32:32 PM	Bypass valve closed
8/15/2012	7:32:32 PM	Helium valve opened
8/15/2012	7:32:32 PM	Bubbler valve opened
8/15/2012	7:32:32 PM	Helium MFC set to  400.000000
8/15/2012	7:32:32 PM	H2 MFC set to  0.000000
8/15/2012	7:32:32 PM	BCl3 MFC set to  0.000000
8/15/2012	7:32:32 PM	PH3 MFC set to  0.000000
8/15/2012	7:32:32 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:32:32 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:32:32 PM	Tube furnace set to 0
8/15/2012	7:51:38 PM	Helium valve closed
8/15/2012	7:51:38 PM	H2 valve closed
8/15/2012	7:51:38 PM	BCl3 valve closed
8/15/2012	7:51:38 PM	PH3 valve closed
8/15/2012	7:51:38 PM	SiCl4 pre valve closed
8/15/2012	7:51:38 PM	SiCl4 post valve closed
8/15/2012	7:51:38 PM	Main Vac valve closed
8/15/2012	7:51:38 PM	Bypass valve closed
8/15/2012	7:51:38 PM	Bubbler valve closed
8/15/2012	7:51:38 PM	Helium MFC set to  0.000000
8/15/2012	7:51:38 PM	H2 MFC set to  0.000000
8/15/2012	7:51:38 PM	BCl3 MFC set to  0.000000
8/15/2012	7:51:38 PM	PH3 MFC set to  0.000000
8/15/2012	7:51:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:51:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:51:38 PM	Tube furnace set to 50
8/15/2012	7:51:39 PM	Helium valve closed
8/15/2012	7:51:39 PM	H2 valve closed
8/15/2012	7:51:39 PM	BCl3 valve closed
8/15/2012	7:51:39 PM	PH3 valve closed
8/15/2012	7:51:39 PM	SiCl4 pre valve closed
8/15/2012	7:51:39 PM	SiCl4 post valve closed
8/15/2012	7:51:39 PM	Main Vac valve closed
8/15/2012	7:51:39 PM	Bubbler valve closed
8/15/2012	7:51:39 PM	Bypass valve opened
8/15/2012	7:51:39 PM	Helium MFC set to  0.000000
8/15/2012	7:51:39 PM	H2 MFC set to  0.000000
8/15/2012	7:51:39 PM	BCl3 MFC set to  0.000000
8/15/2012	7:51:39 PM	PH3 MFC set to  0.000000
8/15/2012	7:51:39 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:51:39 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:51:39 PM	Tube furnace set to 0
8/15/2012	7:52:45 PM	Helium valve closed
8/15/2012	7:52:45 PM	H2 valve closed
8/15/2012	7:52:45 PM	BCl3 valve closed
8/15/2012	7:52:45 PM	PH3 valve closed
8/15/2012	7:52:45 PM	SiCl4 pre valve closed
8/15/2012	7:52:45 PM	SiCl4 post valve closed
8/15/2012	7:52:45 PM	Bypass valve closed
8/15/2012	7:52:45 PM	Bubbler valve closed
8/15/2012	7:52:45 PM	Main Vac valve opened
8/15/2012	7:52:45 PM	Helium MFC set to  0.000000
8/15/2012	7:52:45 PM	H2 MFC set to  0.000000
8/15/2012	7:52:45 PM	BCl3 MFC set to  0.000000
8/15/2012	7:52:45 PM	PH3 MFC set to  0.000000
8/15/2012	7:52:45 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:52:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:52:45 PM	Tube furnace set to 0
8/15/2012	7:52:46 PM	Run finished at 7:52 PM
8/15/2012	7:52:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	7:52:50 PM	Recipe started at 7:52 PM
8/15/2012	7:52:50 PM	Helium valve closed
8/15/2012	7:52:50 PM	H2 valve closed
8/15/2012	7:52:50 PM	BCl3 valve closed
8/15/2012	7:52:50 PM	PH3 valve closed
8/15/2012	7:52:50 PM	SiCl4 pre valve closed
8/15/2012	7:52:50 PM	SiCl4 post valve closed
8/15/2012	7:52:50 PM	Main Vac valve closed
8/15/2012	7:52:50 PM	Bypass valve closed
8/15/2012	7:52:50 PM	Bubbler valve closed
8/15/2012	7:52:50 PM	Helium MFC set to  0.000000
8/15/2012	7:52:50 PM	H2 MFC set to  0.000000
8/15/2012	7:52:50 PM	BCl3 MFC set to  0.000000
8/15/2012	7:52:50 PM	PH3 MFC set to  0.000000
8/15/2012	7:52:50 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:52:50 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:52:50 PM	Tube furnace set to 0
8/15/2012	7:52:53 PM	H2 valve closed
8/15/2012	7:52:53 PM	BCl3 valve closed
8/15/2012	7:52:53 PM	PH3 valve closed
8/15/2012	7:52:53 PM	SiCl4 pre valve closed
8/15/2012	7:52:53 PM	SiCl4 post valve closed
8/15/2012	7:52:53 PM	Main Vac valve closed
8/15/2012	7:52:53 PM	Bypass valve closed
8/15/2012	7:52:53 PM	Bubbler valve closed
8/15/2012	7:52:53 PM	Helium valve opened
8/15/2012	7:52:53 PM	Helium MFC set to  500.000000
8/15/2012	7:52:53 PM	H2 MFC set to  0.000000
8/15/2012	7:52:53 PM	BCl3 MFC set to  0.000000
8/15/2012	7:52:53 PM	PH3 MFC set to  0.000000
8/15/2012	7:52:53 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:52:53 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:52:53 PM	Tube furnace set to 0
8/15/2012	7:54:03 PM	Helium valve closed
8/15/2012	7:54:03 PM	H2 valve closed
8/15/2012	7:54:03 PM	BCl3 valve closed
8/15/2012	7:54:03 PM	PH3 valve closed
8/15/2012	7:54:03 PM	SiCl4 pre valve closed
8/15/2012	7:54:03 PM	SiCl4 post valve closed
8/15/2012	7:54:03 PM	Main Vac valve closed
8/15/2012	7:54:03 PM	Bypass valve closed
8/15/2012	7:54:03 PM	Bubbler valve closed
8/15/2012	7:54:03 PM	Helium MFC set to  0.000000
8/15/2012	7:54:03 PM	H2 MFC set to  0.000000
8/15/2012	7:54:03 PM	BCl3 MFC set to  0.000000
8/15/2012	7:54:03 PM	PH3 MFC set to  0.000000
8/15/2012	7:54:03 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:54:03 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:54:04 PM	Tube furnace set to 0
8/15/2012	7:54:05 PM	Run finished at 7:54 PM
8/15/2012	7:54:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	7:57:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	7:57:20 PM	Recipe started at 7:57 PM
8/15/2012	7:57:20 PM	Helium valve closed
8/15/2012	7:57:20 PM	H2 valve closed
8/15/2012	7:57:20 PM	BCl3 valve closed
8/15/2012	7:57:20 PM	PH3 valve closed
8/15/2012	7:57:20 PM	SiCl4 pre valve closed
8/15/2012	7:57:20 PM	SiCl4 post valve closed
8/15/2012	7:57:20 PM	Main Vac valve closed
8/15/2012	7:57:20 PM	Bubbler valve closed
8/15/2012	7:57:20 PM	Bypass valve opened
8/15/2012	7:57:20 PM	Helium MFC set to  0.000000
8/15/2012	7:57:20 PM	H2 MFC set to  0.000000
8/15/2012	7:57:20 PM	BCl3 MFC set to  0.000000
8/15/2012	7:57:20 PM	PH3 MFC set to  0.000000
8/15/2012	7:57:20 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:57:20 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:57:20 PM	Tube furnace set to 0
8/15/2012	7:58:38 PM	Helium valve closed
8/15/2012	7:58:38 PM	H2 valve closed
8/15/2012	7:58:38 PM	BCl3 valve closed
8/15/2012	7:58:38 PM	PH3 valve closed
8/15/2012	7:58:38 PM	SiCl4 pre valve closed
8/15/2012	7:58:38 PM	SiCl4 post valve closed
8/15/2012	7:58:38 PM	Main Vac valve closed
8/15/2012	7:58:38 PM	Bubbler valve closed
8/15/2012	7:58:38 PM	Bypass valve opened
8/15/2012	7:58:38 PM	Helium MFC set to  0.000000
8/15/2012	7:58:38 PM	H2 MFC set to  0.000000
8/15/2012	7:58:38 PM	BCl3 MFC set to  0.000000
8/15/2012	7:58:38 PM	PH3 MFC set to  0.000000
8/15/2012	7:58:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:58:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:58:38 PM	Tube furnace set to 0
8/15/2012	7:59:38 PM	Helium valve closed
8/15/2012	7:59:38 PM	H2 valve closed
8/15/2012	7:59:38 PM	BCl3 valve closed
8/15/2012	7:59:38 PM	PH3 valve closed
8/15/2012	7:59:38 PM	SiCl4 pre valve closed
8/15/2012	7:59:38 PM	SiCl4 post valve closed
8/15/2012	7:59:38 PM	Bypass valve closed
8/15/2012	7:59:38 PM	Bubbler valve closed
8/15/2012	7:59:38 PM	Main Vac valve opened
8/15/2012	7:59:38 PM	Helium MFC set to  0.000000
8/15/2012	7:59:38 PM	H2 MFC set to  0.000000
8/15/2012	7:59:38 PM	BCl3 MFC set to  0.000000
8/15/2012	7:59:38 PM	PH3 MFC set to  0.000000
8/15/2012	7:59:38 PM	SiCl4 MFC set to  0.000000
8/15/2012	7:59:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	7:59:39 PM	Tube furnace set to 0
8/15/2012	7:59:40 PM	Run finished at 7:59 PM
8/15/2012	7:59:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	8:00:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	8:00:25 PM	Recipe started at 8:00 PM
8/15/2012	8:00:25 PM	Helium valve closed
8/15/2012	8:00:25 PM	H2 valve closed
8/15/2012	8:00:25 PM	BCl3 valve closed
8/15/2012	8:00:25 PM	PH3 valve closed
8/15/2012	8:00:25 PM	SiCl4 pre valve closed
8/15/2012	8:00:25 PM	SiCl4 post valve closed
8/15/2012	8:00:25 PM	Main Vac valve closed
8/15/2012	8:00:25 PM	Bypass valve closed
8/15/2012	8:00:25 PM	Bubbler valve closed
8/15/2012	8:00:25 PM	Helium MFC set to  0.000000
8/15/2012	8:00:25 PM	H2 MFC set to  0.000000
8/15/2012	8:00:25 PM	BCl3 MFC set to  0.000000
8/15/2012	8:00:25 PM	PH3 MFC set to  0.000000
8/15/2012	8:00:25 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:00:25 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:00:25 PM	Tube furnace set to 0
8/15/2012	8:00:28 PM	H2 valve closed
8/15/2012	8:00:28 PM	BCl3 valve closed
8/15/2012	8:00:28 PM	PH3 valve closed
8/15/2012	8:00:28 PM	SiCl4 pre valve closed
8/15/2012	8:00:28 PM	SiCl4 post valve closed
8/15/2012	8:00:28 PM	Main Vac valve closed
8/15/2012	8:00:28 PM	Bypass valve closed
8/15/2012	8:00:28 PM	Bubbler valve closed
8/15/2012	8:00:28 PM	Helium valve opened
8/15/2012	8:00:28 PM	Helium MFC set to  500.000000
8/15/2012	8:00:28 PM	H2 MFC set to  0.000000
8/15/2012	8:00:28 PM	BCl3 MFC set to  0.000000
8/15/2012	8:00:28 PM	PH3 MFC set to  0.000000
8/15/2012	8:00:28 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:00:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:00:28 PM	Tube furnace set to 0
8/15/2012	8:01:37 PM	Helium valve closed
8/15/2012	8:01:37 PM	H2 valve closed
8/15/2012	8:01:37 PM	BCl3 valve closed
8/15/2012	8:01:37 PM	PH3 valve closed
8/15/2012	8:01:37 PM	SiCl4 pre valve closed
8/15/2012	8:01:37 PM	SiCl4 post valve closed
8/15/2012	8:01:37 PM	Main Vac valve closed
8/15/2012	8:01:37 PM	Bypass valve closed
8/15/2012	8:01:37 PM	Bubbler valve closed
8/15/2012	8:01:37 PM	Helium MFC set to  0.000000
8/15/2012	8:01:37 PM	H2 MFC set to  0.000000
8/15/2012	8:01:37 PM	BCl3 MFC set to  0.000000
8/15/2012	8:01:37 PM	PH3 MFC set to  0.000000
8/15/2012	8:01:37 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:01:37 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:01:37 PM	Tube furnace set to 0
8/15/2012	8:01:38 PM	Run finished at 8:01 PM
8/15/2012	8:01:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2012	8:05:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2012	8:05:12 PM	Recipe started at 8:05 PM
8/15/2012	8:05:12 PM	Helium valve closed
8/15/2012	8:05:12 PM	H2 valve closed
8/15/2012	8:05:12 PM	BCl3 valve closed
8/15/2012	8:05:12 PM	PH3 valve closed
8/15/2012	8:05:12 PM	SiCl4 pre valve closed
8/15/2012	8:05:12 PM	SiCl4 post valve closed
8/15/2012	8:05:12 PM	Main Vac valve closed
8/15/2012	8:05:12 PM	Bubbler valve closed
8/15/2012	8:05:12 PM	Bypass valve opened
8/15/2012	8:05:12 PM	Helium MFC set to  0.000000
8/15/2012	8:05:12 PM	H2 MFC set to  0.000000
8/15/2012	8:05:12 PM	BCl3 MFC set to  0.000000
8/15/2012	8:05:12 PM	PH3 MFC set to  0.000000
8/15/2012	8:05:12 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:05:12 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:05:12 PM	Tube furnace set to 0
8/15/2012	8:06:35 PM	Helium valve closed
8/15/2012	8:06:35 PM	H2 valve closed
8/15/2012	8:06:35 PM	BCl3 valve closed
8/15/2012	8:06:35 PM	PH3 valve closed
8/15/2012	8:06:35 PM	SiCl4 pre valve closed
8/15/2012	8:06:35 PM	SiCl4 post valve closed
8/15/2012	8:06:35 PM	Main Vac valve closed
8/15/2012	8:06:35 PM	Bubbler valve closed
8/15/2012	8:06:35 PM	Bypass valve opened
8/15/2012	8:06:35 PM	Helium MFC set to  0.000000
8/15/2012	8:06:35 PM	H2 MFC set to  0.000000
8/15/2012	8:06:35 PM	BCl3 MFC set to  0.000000
8/15/2012	8:06:35 PM	PH3 MFC set to  0.000000
8/15/2012	8:06:35 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:06:35 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:06:35 PM	Tube furnace set to 0
8/15/2012	8:07:35 PM	Helium valve closed
8/15/2012	8:07:35 PM	H2 valve closed
8/15/2012	8:07:35 PM	BCl3 valve closed
8/15/2012	8:07:35 PM	PH3 valve closed
8/15/2012	8:07:35 PM	SiCl4 pre valve closed
8/15/2012	8:07:35 PM	SiCl4 post valve closed
8/15/2012	8:07:35 PM	Bypass valve closed
8/15/2012	8:07:35 PM	Bubbler valve closed
8/15/2012	8:07:35 PM	Main Vac valve opened
8/15/2012	8:07:35 PM	Helium MFC set to  0.000000
8/15/2012	8:07:35 PM	H2 MFC set to  0.000000
8/15/2012	8:07:35 PM	BCl3 MFC set to  0.000000
8/15/2012	8:07:35 PM	PH3 MFC set to  0.000000
8/15/2012	8:07:35 PM	SiCl4 MFC set to  0.000000
8/15/2012	8:07:35 PM	Bypass solenoid MFC set to  0.000000
8/15/2012	8:07:35 PM	Tube furnace set to 0
8/15/2012	8:07:36 PM	Run finished at 8:07 PM
8/15/2012	8:07:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
